Gas-damped micromechanical structure

• US 5,786,927 A
• Filed: 03/12/1997
• Issued: 07/28/1998
• Est. Priority Date: 03/12/1997
• Status: Expired due to Term

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Greywall, Dennis S.
• Primary Examiner(s): Epps, Georgia Y.
• Assistant Examiner(s): BEY, DAWN MARIE
• Application Number:
  US08/815,774
• Time in Patent Office: 503 Days
• Field of Search: 359/290, 359/291
• US Class Current: 359/291
• CPC Class Codes: F16F 9/02 using gas only or vacuum F16F9/006 takes precedence
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence

Abstract

An improved squeeze-type micromechanical structure for high speed operation, i.e., greater than 1 MHz, is disclosed. The structure has a movable member possessing damping holes. The porosity, 1/(ω_o τ), of the movable member is at least about 1.4. The structure is hermetically sealed and is maintained above atmospheric pressure and at a minimum reduced pressure or gas frequency, ω_g /ω_o, of about 1.3. To operate with less than 10 percent "ringing," ω_g /ω_o >1.3 and 0.25+0.7(ω_g /ω_o)² -0.8(ω_g /ω_o -1.25)≦1/(ω_o τ)≦0.25+0.7(ω_g /ω_o)² +(ω_g /ω_o -1.25).

Claims

1. A high-speed gas-damped micromechanical structure comprising:

a movable member;

a gas-tight seal enclosing the movable member; and

a gas within the gas-tight seal, wherein,

ambient pressure within the gas-tight seal is greater than about one atmosphere and no more than about 48 atmospheres.

2. The structure of claim 1, wherein the movable member is characterized by a first side and a second side, and further comprising:

a cavity located on the second side of the movable member,

a plurality of holes for allowing gas to escape from the cavity.

3. The structure of claim 2 wherein the plurality of holes are located in the movable member.

4. A high-speed gas-damped micromechanical structure comprising:

a movable member having a plurality of holes for allowing the passage of gas from a first side of the member to a second side of the member during oscillatory motion of the member;

wherein, ambient pressure of the member is less than about 48 atmospheres, and further wherein 1/(ω

_o τ

) is at least about 1.4 and ω

_g /ω

_o is at least about 1.3, where,

1/(ω

_o τ

) is a measure of porosity of the movable member;

ω

_g /ω

_o is reduced gas frequency; and

ω

_o is resonant frequency of the member in a vacuum.

5. The structure of claim 4 and further wherein:

space="preserve" listing-type="equation">0.25+0.7(ω

.sub.g /ω

.sub.o).sup.2 -0.8(ω

.sub.g /ω

.sub.o -1.25)≦

1/(ω

.sub.o τ

)≦

0.25+0.7(ω

.sub.g /ω

.sub.o).sup.2 +(ω

.sub.g /ω

.sub.o -1.25).

16. The micromechanical optical modulator of claim 4 wherein the distance between the movable layer and the non-moving layer is in the range of 0.6 to 0.75 times a wavelength of an optical signal when the movable layer is in an equilibrium position, and the ambient gas pressure is at least 8 bar.

6. A micromechanical optical modulator comprising:

a movable layer suspended above a non-moving layer, the two layers forming a modulator cavity therebetween;

a gas-tight seal formed over the movable layer; and

a gas, wherein,

when the movable layer moves toward the non-moving layer in response to a signal, a portion of the gas flows out of the modulator cavity providing damping to the movable layer, and further wherein the ambient pressure due to the gas is greater than about one atmosphere and no more than about 48 atmospheres.

7. The micromechanical optical modulator of claim 6 further comprising a plurality of damping holes for allowing the gas to flow out of the modulator cavity.

8. The micromechanical optical modulator of claim 7 wherein the plurality of damping holes is formed in the movable layer.

9. The micromechanical optical modulator of claim 8 wherein, when the movable layer moves toward the non-moving layer, the gas flows from the modulator cavity through the plurality of holes to a region above the movable layer.

10. The micromechanical optical modulator of claim 8 wherein the movable layer has a porsity, 1/ω

_o τ

), of at least about 1.4, and a reduced gas frequency, expressed as ω

_g /ω

_o, of greater than about 1.3, wherein ω

_o is resonant frequency of the member in a vacuum.

11. The micromechanical optical modulator of claim 10 wherein

12. The micromechanical optical modulator of claim 6 wherein nonmovable layer is characterized by a first refractive index and the movable layer is characterized by a second refractive index and wherein the second refractive index is about equal to the square root of the first refractive index.

13. The micromechanical optical modulator of claim 10 wherein ω

_g /ω

_o is about 2.0 and 2.7≦

1/(ω

_o τ

)≦

3.8.

14. The micromechanical optical modulator of claim 6 wherein the gas is selected from the group consisting of hydrogen and noble gases.

15. The micromechanical optical modulator of claim 6 wherein the distance between the movable layer and the non-moving layer is equal to about one quarter of a wavelength of an optical signal when the movable layer is in an equilibrium position, and the ambient gas pressure is at least 2 bar.

17. A high-speed gas-damped micromechanical structure comprising:

a movable member;

a gas-tight seal enclosing the movable member; and

a gas within the gas-tight seal, wherein,

space="preserve" listing-type="equation">0.25+0.7(ω

.sub.g /ω

.sub.o).sup.2 -0.8(ω

.sub.g /ω

.sub.o -1.25)≦

1/(ω

.sub.o τ

)≦

0.25+0.7(ω

.sub.g /ω

.sub.o).sup.2 +(ω

.sub.g /ω

.sub.o -1.25).

1/(ω

_o τ

) is a measure of porosity of the movable member;

ω

_g /ω

_o is reduced gas frequency; and

ω

_o is resonant frequency of the member in a vacuum.

18. The structure of claim 17, wherein the movable member is a movable layer that is suspended above a non-moving layer, the two layers forming a modulator cavity therebetween.