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Methods for fabrication of thin film inductors, inductor networks, inductor/capactor filters, and integration with other passive and active devices, and the resultant devices

  • US 5,788,854 A
  • Filed: 09/26/1994
  • Issued: 08/04/1998
  • Est. Priority Date: 08/16/1993
  • Status: Expired due to Term
First Claim
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1. A method for fabricating an electronic device including at least two inductors and at least one capacitor, comprising the steps of:

  • forming on a first surface of substrate having two surfaces a first patterned conductive area comprising pads and a plate of at least one capacitor, said conductive areas being separated from each other;

    forming a patterned dielectric layer above said plate, said dielectric layer having a via for each inductor in said device, said vias penetrating through said dielectric layer so that an electrical connection may be made by each said inductor to an associated one of said pads;

    forming a second patterned conductive layer disposed on top of said dielectric layer and over at least part of said plate; and

    forming a third patterned conductive layer comprising at least two inductors which provide desired inductance values, each of said inductors being electrically connected at one end thereof to said plate through one of said vias, and the other end of each of said inductors being electrically connected to an associated one of said pads.

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