Condition responsive sensor
First Claim
1. A condition responsive sensor comprising an electrically insulative substrate having an electrically conductive stationary plate on one surface thereof defining a first capacitor plate, an electrically conductive movable plate member having a second capacitor plate overlying and generally aligned with and spaced from the first capacitor plate, the first and second capacitor plates forming a condition responsive capacitor and electrical lead means connected to the respective capacitor plate in which the movable plate member is formed of refractory metal selected from the group consisting of tungsten, tantalum and molybdenum and coated with a glass seal enhancing material and the substrate is formed of glass having a selected thermal coefficient of expansion.
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Accused Products
Abstract
A condition responsive capacitive transducer, such as an accelerometer, is shown using a material system having refractory metal for the sensing element and glass material for a supporting substrate. The refractory metal is preferably tungsten, tantalum or molybdenum, and is coated with a glass seal enhancing material, such as titanium or nickel.
11 Citations
4 Claims
- 1. A condition responsive sensor comprising an electrically insulative substrate having an electrically conductive stationary plate on one surface thereof defining a first capacitor plate, an electrically conductive movable plate member having a second capacitor plate overlying and generally aligned with and spaced from the first capacitor plate, the first and second capacitor plates forming a condition responsive capacitor and electrical lead means connected to the respective capacitor plate in which the movable plate member is formed of refractory metal selected from the group consisting of tungsten, tantalum and molybdenum and coated with a glass seal enhancing material and the substrate is formed of glass having a selected thermal coefficient of expansion.
Specification
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- Resources
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Current AssigneeTexas Instruments, Inc.
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Original AssigneeTexas Instruments, Inc.
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InventorsPark, June, Corkum, David L.
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Primary Examiner(s)CHAPMAN JR, JOHN E
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Application NumberUS08/723,435Time in Patent Office680 DaysField of Search73/514.32, 73/514.18, 73/718, 73/724, 73/862, 73/626, 361/280, 361/283.1, 361/283.4, 361/283.3US Class Current73/514.32CPC Class CodesG01P 1/006 used for thermal compensationG01P 15/125 by capacitive pick-up
