Information processing aparatus effecting probe position control with electrostatic force

• US 5,793,040 A
• Filed: 01/16/1996
• Issued: 08/11/1998
• Est. Priority Date: 01/13/1995
• Status: Expired due to Term

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Oguchi, Takahiro, Sakai, Kunihiro
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US08/586,090
• Time in Patent Office: 938 Days
• Field of Search: 250/306, 250/307, 250/423 F, 364/126, 73/105
• US Class Current: 850/1
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08
• CPC Class Codes: G11B 9/1445 switching at least one head in operating function; Controlling the relative spacing to keep the head operative, e.g. for allowing a tunnel current flow
• CPC Class Codes: Y10S 977/851 Particular movement or positioning of scanning tip
• CPC Class Codes: Y10S 977/872 Positioner

Abstract

An information processing apparatus utilizing a scanning tunnel microscope includes a probe, a detector for detecting the distance between the probe and an object opposed thereto, based on a physical interaction working between the probe and the object, an electrostatic actuator for displacing the probe, for adjusting the distance between the probe and the object. The electrostatic actuator includes mutually opposed two electrodes: A controller is provided for controlling the amount of charge to be accumulated between the electrodes, so as to maintain a desired distance between the probe and the object, based on the result of detection by the detector.

Claims

1. An information processing apparatus comprising:

a probe;

means for detecting a distance between said probe and an object opposed thereto, based on a physical interaction working between said probe and said object;

an electrostatic actuator for displacing said probe, for adjusting the distance between said probe and said object, said electrostatic actuator including mutually opposed two plate electrodes;

means for detecting a difference between the detected distance and a target distance and for setting a target amount of charge required for compensating said difference; and

control means for controlling the amount of charge to be accumulated between said plate electrodes on the basis of said target amount of charge.

2. An information processing apparatus according to claim 1, wherein said object is a recording medium.

3. An information processing apparatus according to claim 1, wherein said object is a specimen to be observed.

4. An information processing apparatus according to claim 1, wherein said physical interaction is a tunnelling current.

5. An information processing apparatus according to claim 1, wherein said physical interaction is evanescent light.

6. An information processing apparatus according to claim 1, wherein said physical interaction is interatomic force.

7. An information processing apparatus according to claim 1, wherein said control means includes means for detecting the amount of charge accumulated between said electrodes and for effecting said control in such a manner that said detected amount of charge becomes equal to a desired charge amount corresponding to said desired distance.

8. An information processing apparatus according to claim 7, wherein said control means effects said control of the charge amount by regulating the current supplied to said electrodes.

9. An information processing apparatus according to claim 7, wherein the detection of amount of charge by said charge amount detection means is effected by using a detecting capacitor disposed serially with a capacitor formed by said electrodes.

10. An information processing apparatus according to claim 7, wherein the detection of amount of charge by said charge amount detection means is effected by measuring the capacity of a capacitor formed between said electrodes.

11. An information processing apparatus according to claim 1, wherein said charge amount control means includes:

means for generating an AC drive signal for driving said electrostatic actuator; and

means for modulating an amplitude of said AC drive signal so as to control said amount of charge.

12. An information processing apparatus according to claim 11, wherein the frequency of said AC drive signal is higher than the mechanical resonance frequency of said electrostatic actuator.

13. An information processing apparatus according to claim 1, wherein said charge amount control means includes:

means for generating an AC drive signal for driving said electrostatic actuator; and

means for adjusting a frequency of said AC drive signal so as to control said amount of charge.