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Spatial feature tracking impedence sensor using multiple electric fields

  • US 5,793,176 A
  • Filed: 04/02/1993
  • Issued: 08/11/1998
  • Est. Priority Date: 04/02/1993
  • Status: Expired due to Fees
First Claim
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1. Apparatus for tracking a feature on a workpiece comprising:

  • at least two pairs of electrodes disposed on a planar mount oriented parallel to the axis of the feature and above the workpiece with one electrode in each pair operating as a transmitter of an electric field and the other electrode in each pair operating as a receiver of the field;

    means to drive each of the transmitting electrodes at a separate frequency;

    means to combine the signals from the receiver electrodes to provide information indicative of the position of the mount relative to the feature; and

    means to drive the mount in response to the position information.

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