Micromolded integrated ceramic light reflector
First Claim
1. A ceramic light reflector device comprising:
- (a) a ceramic micromolded base element including a cavity formed in a surface thereof, said cavity including a bottom face;
(b) a ceramic beam integrally connected to said ceramic base element and cantilevered over said cavity;
(c) a first ceramic laminate on a top surface of said beam, said first ceramic laminate being electrically conductive; and
(d) an electrically conductive second laminate on said bottom face.
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Accused Products
Abstract
A micromolded integrated ceramic light reflector which can be totally integrated with drive and control electronics embedded on the same substrate for use with image projection systems. Each light reflector can be molded to a size on the order of less than one (1) mm3 using the method of the present invention. Each light reflector includes a ceramic base element with a cavity and one surface thereof. A beam extends from one end of the cavity and cantilevers out therefrom above the cavity. The beam is made from the same ceramic as the base element and is coated with an electrically conductive ceramic coating which is also a good reflector of the visible radiation spectrum. The base of the cavity is coated with the same electrically conductive ceramic, or with a metallic coating. In either case, the coating is electrically grounded. When the beam is in its normal, undeflected position, light incident on the top surface of the beam reflects at a first angle. When a potential is applied to the activation electrode, the beam is deflected downward into the cavity. In this position, light incident on the beam reflects at a second angle. Thus, control of the light output to a given surface over a small spot (pixel) is achieved by controlling the potential across the ceramic light reflector.
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Citations
32 Claims
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1. A ceramic light reflector device comprising:
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(a) a ceramic micromolded base element including a cavity formed in a surface thereof, said cavity including a bottom face; (b) a ceramic beam integrally connected to said ceramic base element and cantilevered over said cavity; (c) a first ceramic laminate on a top surface of said beam, said first ceramic laminate being electrically conductive; and (d) an electrically conductive second laminate on said bottom face. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for micromolding a ceramic light reflector comprising the steps of:
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(a) etching a silicon wafer to generate a master mold; (b) forming a negative master from a micro feature replicating material using said master mold; (c) mounting the negative master in a die; (d) placing a ceramic powder in the die; (e) compression molding the ceramic powder to form a green base element with a cavity in one surface thereof; (f) forming a green beam from the ceramic powder; (g) supporting the green beam on the green base element such that the green beam is cantilevered over the cavity; and (h) sintering the green beam and the green base element.
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17. An electrostatic light reflector device comprising:
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(a) a micromolded ceramic base element including a cavity formed in a surface thereof, said cavity including a bottom face; (b) a ceramic beam sintered to said base element and cantilevered over said cavity; (c) a first ceramic laminate sintered to a top surface of said beam, said first ceramic laminate being reflective of visible light and also being electrically conductive; and (d) an electrically conductive second laminate sintered on said bottom face. - View Dependent Claims (18, 19, 20, 21)
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22. A method for micromolding a ceramic light reflector comprising the steps of:
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(a) etching a silicon wafer to generate a master mold; (b) forming a negative master from a micro feature replicating material using said master mold; (c) mounting the negative master in a die; (d) placing a ceramic powder in the die; (e) compression molding the ceramic powder to form a green base element with a cavity in one surface thereof; (f) forming a green beam from the ceramic powder; (g) forming a first green ribbon from an electrically conductive ceramic which reflects light in the visible spectrum; (h) forming a second green ribbon from an electrically conductive ceramic; (i) supporting the green beam and the first green ribbon on the green base element such that the green beam and the first green ribbon are cantilevered over the cavity; and (j) sintering the green beam, the first green ribbon and the green base element. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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30. A light reflector device comprising:
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(a) a micromolded ceramic base element including a cavity formed in a surface thereof, said cavity including a bottom face; (b) a ceramic beam sintered to said base element and cantilevered over said cavity; (c) a first ceramic laminate sintered to a top surface of said beam, said first laminate being electrically conductive; (d) an electrically conductive second ceramic laminate sintered on said bottom face. - View Dependent Claims (31, 32)
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Specification