Zero dead-leg valve structure

• US 5,794,659 A
• Filed: 12/31/1996
• Issued: 08/18/1998
• Est. Priority Date: 04/09/1993
• Status: Expired due to Term

• Current Assignee: BOC Group Pty Limited (Linde Plc), SCI Systems Incorporated (Sanmina-SCI Corporation)
• Original Assignee: BOC Group Pty Limited (Linde Plc), SCI Systems Incorporated (Sanmina-SCI Corporation)
• Inventors: DuRoss, Ronald R., Tucker, William K.
• Primary Examiner(s): Hepperle, Stephen M.
• Application Number:
  US08/777,837
• Time in Patent Office: 595 Days
• Field of Search: 137/597, 137/606, 137/607, 137/883, 137/595, 137/599
• US Class Current: 137/597
• CPC Class Codes: C23C 16/4408 by purging residual gases from the reaction chamber or gas lines
• CPC Class Codes: F16K 11/207 with two handles or actuating mechanisms at opposite sides of the housing
• CPC Class Codes: F16K 11/22 with an actuating member for each valve, e.g. interconnected to form multiple-way valves
• CPC Class Codes: F16K 17/003 reacting to pressure and temperature
• CPC Class Codes: F16K 27/003 Housing formed from a plurality of the same valve elements
• CPC Class Codes: F17D 1/04 for distribution of gas
• CPC Class Codes: Y10T 137/0402 Cleaning, repairing, or assembling
• CPC Class Codes: Y10T 137/0491 Valve or valve element assembling, disassembling, or replacing
• CPC Class Codes: Y10T 137/4252 Reverse fluid flow
• CPC Class Codes: Y10T 137/4259 With separate material addition
• CPC Class Codes: Y10T 137/87249 Multiple inlet with multiple outlet
• CPC Class Codes: Y10T 137/87877 Single inlet with multiple distinctly valved outlets
• CPC Class Codes: Y10T 137/87893 With fluid actuator

Abstract

A valve structure without dead-legs is provided for controlling the flow of gases in a semiconductor fabrication facility. The valve structure comprises a conduit forming a loop with three ports. Flexible metallic diaphragms are selectively operable to open and close two of the ports.

Claims

1. Valve apparatus for controlling the flow of gases, said apparatus comprising, in combination;

at least one conduit in the form of a loop;

said conduit having first, second and third ports spaced apart from one another;

a pair of valve closure members, each being mounted adjacent one of said first and second ports and being movable to open and close the port to which it is adjacent; and

an actuating device for selectively actuating said valve closure members to selectively open and close said first and second ports;

in which said conduit extends from said third port past said first port and then past said second port and then back to said third port, and in which said valve closure members do not occlude said conduit.

2. Apparatus as in claim 1, in which said one conduit and said ports are formed in a single body member, and said closure members are mounted to said body member.

3. Apparatus as in claim 1 in which said closure members are flexible metal diaphragms.

4. Apparatus as in claim 1 in which said actuating device comprises means for pneumatically controlling the positions of said valve closure members.

5. Apparatus as in claim 1 in which said first and second ports are located substantially on opposite sides of said loop, and said third port is located between said first and second ports.

6. Apparatus as in claim 1 in which said loop is formed by a body member having first and second passageways therein, and third and fourth passageways joining said first and second passageways adjacent their ends, said first and second ports being located in said third and fourth passageways.

7. Apparatus as in claim 6 in which each of said third and fourth passageways is formed, on one side, by one of said valve closure members, and on the opposite side, by a side wall of said body member in which one of said first and second ports is formed.

8. Apparatus as in claim 7 and including a raised valve seat around each of said first and second ports so that when one of said diaphragms makes contact with said seat to close one of said first and second ports, a space is left for fluid to flow past said seat.

9. Apparatus as in claim 6 in which said third port is located in one of said first and second passageways.