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Method and apparatus for numerically controlled probing

  • US 5,796,619 A
  • Filed: 02/15/1996
  • Issued: 08/18/1998
  • Est. Priority Date: 02/15/1996
  • Status: Expired due to Term
First Claim
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1. A probing system for determining a measured set of dimensions of at least one feature of an object, said system comprising:

  • an input device that receives an ideal set of dimension of the at least one feature, said input device generating a first signal indicative of an amount of samples and a location of each of the samples of the at least one feature;

    a probe device, electrically connected to said input device, said probe device receiving the first signal from said input device, and in response directing a probe to the location of each of the samples, said probe device outputting a second signal indicative of measured three-dimensional locations of the samples; and

    a processor electrically connected to said probe device, said processor receiving the second signal indicative of the measured three-dimensional locations of the samples, said processor operating upon said second signal to numerically rotate the three-dimensional measured locations about a single one of the samples until each of the samples is numerically represented as a point lying on a single two dimensional plane, said processor using the numerically rotated samples to calculate a set of rotated dimensions, said processor then operating on said rotated dimensions to numerically counter-rotate said rotated dimensions about the single one of the samples to determine the measured set of dimensions.

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