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Laser beam-splitting apparatus

  • US 5,798,867 A
  • Filed: 02/04/1997
  • Issued: 08/25/1998
  • Est. Priority Date: 02/04/1997
  • Status: Expired due to Fees
First Claim
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1. A laser beam-splitting apparatus for producing a plurality of split laser beams from a primary laser beam, said apparatus comprising:

  • one or a plurality of partial reflection and transmission mirrors, each of said mirrors having a reflectance and transmittance to the wave length of said primary laser beam continuously varying in one-dimensional or two-dimensional directions on the mirror surface and each of said mirrors being disposed on the optical axis of the laser beam, wherein the laser beams reflected or transmitted from said reflection and transmission mirrors are output as the split laser beams, respectively;

    mirror support means for supporting said partial reflection and transmission mirrors across said optical axis of said laser beam;

    adjusting means for adjusting a position of each said partial reflection and transmission mirrors so as to obtain a desired reflectance and transmittance; and

    fixing means for fixing said mirror support means at the position at which the desired reflectance and transmittance are obtained.

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