Method of fabricating thin film piezoelectric device

• US 5,801,069 A
• Filed: 01/31/1996
• Issued: 09/01/1998
• Est. Priority Date: 09/11/1995
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Kuragaki, Takeshi, Sato, Kazuhiko, Harada, Kenichi, Ishihara, Osamu, Kudo, Akiyoshi
• Primary Examiner(s): TSAI, H JEY
• Application Number:
  US08/594,769
• Time in Patent Office: 944 Days
• Field of Search: 438/52-53, 438/924, 438/970, 29/25.35
• US Class Current: 438/52
• CPC Class Codes: H03H 2003/021 the resonators or networks being of the air-gap type
• CPC Class Codes: H03H 2003/023 the resonators or networks being of the membrane type
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/173 Air-gaps
• CPC Class Codes: H03H 9/174 Membranes

Abstract

A method of fabricating a thin film piezoelectric device includes preparing a semiconductor substrate having a surface; forming an etch stopping layer having an etching rate on the surface of the semiconductor substrate; forming a first semiconductor layer having an etching rate higher than the etching rate of the etch stopping layer on the etch stopping layer; forming a first electrode on a region of the first semiconductor layer; forming a piezoelectric film on the first electrode; forming a second electrode on the piezoelectric film; and etching a portion of the first semiconductor layer where the first electrode, the piezoelectric film, and the second electrode overlap, from the surface of the first semiconductor layer, selectively with respect to the etch stopping layer, thereby forming a cavity in the first semiconductor layer. Even when a compound semiconductor is employed as the substrate, the etching forming a cavity is stopped at the etch stopping layer in the direction perpendicular to the surface of the first semiconductor layer so that a cavity having a uniform depth is produced with high controllability.

Claims

1. A method of fabricating a thin film piezoelectric device comprising:

preparing a semiconductor substrate having a surface;

forming an etch stopping layer having an etching rate on the surface of the semiconductor substrate;

forming a first semiconductor layer having an etching rate higher than the etching rate of the etch stopping layer on the etch stopping layer;

forming a first electrode on a region of the first semiconductor layer;

forming a piezoelectric film on the first electrode;

forming a second electrode on the piezoelectric film; and

etching a portion of the first semiconductor layer opposite where the first electrode, the piezoelectric film, and the second electrode overlap, from the surface of the first semiconductor layer and selectively with respect to the etch stopping layer, thereby forming a cavity in the first semiconductor layer.

2. The method of claim 1 further including:

after formation of the first semiconductor layer, forming an insulating film on the first semiconductor layer;

forming openings in the insulating film at regions adjacent to the first electrode; and

etching the first semiconductor layer from the surface exposed in the openings in the insulating film.