Capacitive sensor

• US 5,801,313 A
• Filed: 05/24/1996
• Issued: 09/01/1998
• Est. Priority Date: 05/26/1995
• Status: Expired due to Term

• Current Assignee: Omron Corporation
• Original Assignee: Omron Corporation
• Inventors: Omi, Toshihiko, Sato, Fumihiko, Horibata, Kenji
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US08/653,301
• Time in Patent Office: 830 Days
• Field of Search: 73/514.32, 73/654, 73/718, 73/724, 361/283.4
• US Class Current: 73/718
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

To provide a capacitive sensor which produces a sensor output excellent in linearity. The capacitive sensor comprises a first semiconductor substrate and a second substrate. The first semiconductor substrate is formed with a frame portion and a diaphragm portion serving as a movable electrode, and bonded with the second substrate at the upper surface of the frame portion by anodic bonding. The second substrate is provided with a fixed electrode on a surface facing the diaphragm portion. A fixing projection is provided on a center of the diaphragm portion and is fixed to the second substrate through a hole of the fixed electrode. When external force is applied to the sensor, the diaphragm portion displaces upward and/or downward. The external force is detected based on change of electrostatic capacitance. Since the center of the diaphragm portion is fixed by the fixing projection, the maximum displacement region of the diaphragm portion forms a ring, resulting in enhancement of linearity of the sensor output.

Claims

1. A capacitive sensor for sensing pressure, comprising:

a first substrate having a thin portion capable of being displaced by external force and wherein said thin portion serves as a movable electrode;

a second substrate having a fixed electrode provided on a position facing said movable electrode, a gap being formed between said movable electrode and said fixed electrode; and

a fixing member connected between the first and second substrate for fixing the center of said thin portion so as to prevent the center of said thin portion from being displaced.

2. The capacitive sensor according to claim 1 wherein at least one of said first substrate and said second substrate is formed with a recess, having a depth, for forming said gap, and a projection, having a height, is formed in said recess integrally with said first substrate or said second substrate, the height of said projection being equal to the depth of said recess.

3. The capacitive sensor according to claim 1 wherein said fixing member is a multilayer including at least one insulating layer formed on said first substrate or said second substrate.

4. The capacitive sensor according to claim 1 wherein said capacitive sensor detects pressure based on electrostatic capacitance between said movable electrode and said fixed electrode.

5. The capacitive sensor according to claim 1 wherein said first substrate is made of a silicon semiconductor.

6. The capacitive sensor according to claim 1 wherein said first substrate and said second substrate are made of a silicon semiconductor, and portions of said first substrate and said second substrate serve as said moveable electrode and said fixed electrode, respectively.

7. A capacitive sensor according to claim 1, wherein said fixed electrode is circular and has a center, and wherein said fixing member is attached in the center of said fixed electrode.

8. A capacitive sensor according to claim 1, wherein said thin portion is circular and has a center and a circumference, and wherein said fixing member is attached in the center of said thin portion.

9. A capacitive sensor according to claim 8, wherein said thin portion is thin from the center to the circumference.

10. A capacitive sensor according to claim 1, wherein said first substrate comprises an outer frame disposed around said thin portion, wherein said outer frame has a thickness greater than said thin portion.

11. A capacitive sensor according to claim 1, wherein said thin portion has an approximately uniform thickness, at least for that part of said thin portion in adjacency to said fixed electrode.