Microchannel cooling of high power semiconductor devices
First Claim
1. A microchannel cooled semiconductor structure, comprising:
- a die of semiconductor material and wherein said semiconductor material is silicon or silicon carbide;
a plurality of semiconductor devices formed in one region of said die; and
a plurality of close-ended forced convection cooling microchannel slots formed in another region of said; and
wherein said microchannel slots have a width ranging between about 0.001 in. and about 0.004 in., a depth ranging between about 0.004 in. and about 0.01 in., and a spacing therebetween ranging between about 0.001 in. and about 0.005 in.
2 Assignments
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Accused Products
Abstract
Cooling of densely packaged semiconductor devices is achieved by microchannels which extract heat by forced convection and the use of fluid coolant located as close as possible to the heat source. The microchannels maximize heat sink surface area and provides improved heat transfer coefficients, thereby allowing a higher power density of semiconductor devices without increasing junction temperature or decreasing reliability. In its preferred embodiment, a plurality of microchannels are formed directly in the substrate portion of a silicon or silicon carbide chip or die mounted on a ground plane element of a circuit board and where a liquid coolant is fed to and from the microchannels through the ground plane. The microchannels comprise a plurality of closed-ended slots or grooves of generally rectangular cross section. Fabrication methods include deposition and etching, lift-off processing, micromachining and laser cutting techniques.
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Citations
22 Claims
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1. A microchannel cooled semiconductor structure, comprising:
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a die of semiconductor material and wherein said semiconductor material is silicon or silicon carbide; a plurality of semiconductor devices formed in one region of said die; and a plurality of close-ended forced convection cooling microchannel slots formed in another region of said; and wherein said microchannel slots have a width ranging between about 0.001 in. and about 0.004 in., a depth ranging between about 0.004 in. and about 0.01 in., and a spacing therebetween ranging between about 0.001 in. and about 0.005 in. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A multichannel cooled semiconductor, comprising:
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a die of silicon or silicon carbide; a plurality of heat generating semiconductor devices formed in said die; and a plurality of close-ended cooling microchannel slots formed directly in said die in relatively close proximity to said plurality of semiconductor devices to provide convection cooling of said semiconductor devices, and wherein said microchannel slots have a width ranging between about 0.001 in. and about 0.004 in., a depth ranging between about 0.004 in. and about 0.01 in., a spacing therebetween ranging between about 0.001 in. and about 0.005 in., and a channel length ranging between about 0.032 in. and about 0.5 in.
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Specification