Method and apparatus for eliminating the effects of varying sample distance on optical measurements
First Claim
1. A method for eliminating effects of varying sample distance on optical measurements, comprising the steps of:
- a) placing a measurement sample at an actual position, wherein said actual position may differ from a desired, nominal position;
b) providing a light source in front of the measurement sample;
c) providing a source lens assembly between the light source and the measurement sample, wherein a source focal point of the source lens assembly lies on one side of the measurement sample;
d) providing a light detector in front of the measurement sample; and
e) providing a detector lens assembly between the detector and the measurement sample, wherein a detector focal point of the detector lens assembly lies on another side of the measurement sample.
1 Assignment
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Accused Products
Abstract
A method and apparatus for eliminating the effects of varying sample distance on optical measurements. In a first embodiment, a light source and a detector are both positioned in front of a measurement sample. A light source lens assembly focuses the light such that its focal point is behind the measurement sample, while a detector lens assembly focuses the light reflected from the measurement sample such that its focal point is in front of the measurement sample. Any movement of the measurement sample away from its nominal position does not affect the detector output because the effects of the source lens assembly and the detector lens assembly cancel each other. In a second embodiment, a light source and two detectors are positioned on one side off a measurement sample. The first detector is placed at a small angle relative to the sample normal, while the second detector is placed at a relatively large angle relative to the sample normal. A system output, which does not vary if the measurement sample is moved from its nominal position, comprises the weighted summation of the first and second detector outputs and a correction signal. The correction signal comprises a weighted difference of the first and second detector outputs.
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Citations
20 Claims
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1. A method for eliminating effects of varying sample distance on optical measurements, comprising the steps of:
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a) placing a measurement sample at an actual position, wherein said actual position may differ from a desired, nominal position; b) providing a light source in front of the measurement sample; c) providing a source lens assembly between the light source and the measurement sample, wherein a source focal point of the source lens assembly lies on one side of the measurement sample; d) providing a light detector in front of the measurement sample; and e) providing a detector lens assembly between the detector and the measurement sample, wherein a detector focal point of the detector lens assembly lies on another side of the measurement sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An apparatus for eliminating effects of varying sample distance on optical measurements, comprising:
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a measurement sample placed at an actual position, wherein said actual position may differ from a desired, nominal position; a light source positioned in front of the measurement sample; a source lens assembly positioned between the light source and the measurement sample, wherein a source focal point of the source lens assembly lies on one side of the measurement sample; a light detector positioned in front of the measurement sample; and a detector lens assembly positioned between the detector and the measurement sample, wherein a detector focal point of the detector lens assembly lies on another side of the measurement sample. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A method for eliminating effects of varying sample distance on optical measurements, comprising the steps of:
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a) placing a measurement sample at an actual position, wherein said actual position may differ from a desired, nominal position; b) providing a light source on one side of the measurement sample; c) providing a first light detector on the one side of the measurement sample, wherein the first light detector is placed at a first angle from a normal vector of the measurement sample; d) providing a second light detector on the one side of the measurement sample, wherein the second light detector is placed at a second angle from the normal vector of the measurement sample; e) creating a correction signal comprising a weighted difference between a first output of the first Light detector and a second output of the second light detector; and f) creating a corrected output signal comprising a weighted summation of the first output, the second output and the correction signal. - View Dependent Claims (18)
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19. An apparatus for eliminating effects of varying sample distance on optical measurements, comprising:
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a measurement sample placed at an actual position, wherein said actual position may differ from a desired, nominal position; a light source positioned on one side of the measurement sample; a first light detector on the one side of the measurement sample, wherein the first light detector is placed at a first angle from a normal vector of the measurement sample; a second light detector on the one side of the measurement sample, wherein the second light detector is placed at a second angle from the normal vector of the measurement sample; and an electrical circuit coupled to the first and second light detectors and operable to create; a correction signal comprising a weighted difference between a first output of the first light detector and a second output of the second light detector; and a corrected output signal comprising a weighted summation of the first output, the second output and the correction signal. - View Dependent Claims (20)
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Specification