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Method of adjusting natural frequency of dual-axis vibratory structure

  • US 5,804,087 A
  • Filed: 05/21/1996
  • Issued: 09/08/1998
  • Est. Priority Date: 05/25/1995
  • Status: Expired due to Term
First Claim
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1. A method of adjusting the natural frequency of a dual-axis vibratory structure having:

  • a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force;

    a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and

    a mass portion, said method comprising the steps of;

    measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes;

    varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and

    repeating said measuring step and said thickness varying step until the natural frequencies of the first and third axes directions are within the scope of a permissible error.

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