Method of adjusting natural frequency of dual-axis vibratory structure
First Claim
1. A method of adjusting the natural frequency of a dual-axis vibratory structure having:
- a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force;
a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and
a mass portion, said method comprising the steps of;
measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes;
varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and
repeating said measuring step and said thickness varying step until the natural frequencies of the first and third axes directions are within the scope of a permissible error.
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Accused Products
Abstract
There is provided a method of adjusting the natural frequency of a dual-axis vibratory structure having: a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force; a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and a mass portion, the method comprising the steps of: measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes; varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and repeating the measuring step and the thickness varying step until the natural frequency of the first and third axes directions are within the scope of a permissible error. The method can be adjusted to coincide the natural frequency of the vibratory structure with a design value, so that linearity and the sensitivity of a sensor are improved and operation bandwidth increases.
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Citations
7 Claims
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1. A method of adjusting the natural frequency of a dual-axis vibratory structure having:
- a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force;
a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and
a mass portion, said method comprising the steps of;measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes; varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and repeating said measuring step and said thickness varying step until the natural frequencies of the first and third axes directions are within the scope of a permissible error. - View Dependent Claims (2, 3, 4, 5, 6)
- a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force;
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7. A method of adjusting the natural frequency of a dual-axis vibratory structure, for use in a gyroscope, having:
- a first spring member of a first axis direction coinciding with the direction receiving an electrostatic force;
a second spring member of a second axis direction perpendicular to the first direction having a width narrower than that of the first spring member; and
a mass portion, said method comprising the steps of;measuring the natural frequency relative to the first axis direction and the third axis direction perpendicular to a plane formed by the first and second axes of the vibratory structure; varying the thickness of the first spring member of the first axis direction so as to adjust the natural frequency of the third axis direction, while fixing the natural frequency of the first axis direction; and repeating said measuring step and said thickness varying step until the natural frequency of the first axis direction and the third axis direction is within the scope of a permissible error.
- a first spring member of a first axis direction coinciding with the direction receiving an electrostatic force;
Specification