Process and device for coating a substrate surface with vaporized inorganic material

• US 5,804,258 A
• Filed: 12/24/1996
• Issued: 09/08/1998
• Est. Priority Date: 01/10/1996
• Status: Expired due to Term

• Current Assignee: 3A Technology & Management Ltd.
• Original Assignee: Alusuisse Technology & Management Limited
• Inventors: Lohwasser, Wolfgang, Wisard, Andre
• Primary Examiner(s): PADGETT, MARIANNE L
• Application Number:
  US08/773,761
• Time in Patent Office: 623 Days
• Field of Search: 427/566, 427/567, 427/562, 427/563, 427/564, 427/570, 427/585
• US Class Current: 427/562
• CPC Class Codes: C23C 14/30 by electron bombardment
• CPC Class Codes: H01J 2237/004 Charge control of objects or beams
• CPC Class Codes: H01J 2237/3137 Plasma-assisted co-operation
• CPC Class Codes: H01J 37/3053 for evaporating or etching

Abstract

In a process for coating a substrate surface with a layer of inorganic material, the inorganic material is vaporised in a vacuum chamber evacuated to at least 10^-3 mbar by bombarding with an electron beam from a high voltage electron-beam gun and deposited on the substrate surface. Gas discharging is created between the point of incidence (A) of the electron beam on the inorganic material to be vaporised and an anode such that the electrostatic charge created by the high voltage electron-beam gun flows off via the anode. This way damage to the substrate, which may arise as a result discharging phenomena, can be effectively avoided.

Claims

1. Process for coating, which comprises:

providing a substrate surface and an anode spaced therefrom in a vacuum chamber with gas therein;

coating said substrate surface with a layer of inorganic material by vaporizing said inorganic material in said vacuum chamber evacuated to 10^-3 mbar or less, including bombarding said inorganic material with an electron beam from an electron-beam gun to vaporize said inorganic material, and wherein said gun creates an electrostatic charge, and wherein there is a point of incidence (A) between the inorganic material and the electron beam, and depositing the vaporized inorganic material on the substrate surface as a coating;

wherein gas discharge is created in the gas and in the vaporized inorganic material between the point of incidence (A) of the electron beam on the inorganic material to be vaporized and said anode such that the electrostatic charge created by the electron-beam gun flows off via the anode;

with said anode having an electrical conductivity and a surface, and wherein, in order to maintain the electrical conductivity at the surface of the anode and to prevent the anode from being coated, the anode is heated to a temperature exceeding that at which the vaporized inorganic material condenses;

with the voltage applied to said electron-beam gun being at least 5 kV and wherein the substrate is a non-electrically conductive substrate and said coating is a non-electrically conductive material.

2. Process according to claim 1, wherein the anode is heated electrically by way of a transformer.

3. Process according to claim 1, wherein during coating the gas is introduced into the vacuum chamber.

4. Process according to claim 1, wherein said vacuum chamber has a pressure, and wherein, in order to stabilize the gas discharging, the pressure in the vacuum chamber is kept constant.

5. Process according to claim 4, wherein the vacuum chamber pressure is kept constant automatically via a closed circuit control system.

6. Process according to claim 1, wherein said vacuum chamber has a pressure, and wherein the pressure in the vacuum chamber is set at a value of 10^-3 to 2×

10^-4 mbar.

7. Process according to claim 1, wherein said substrate is a plastic film.

8. Process according to claim 1, wherein the gas in the vacuum chamber is inert.

9. Process according to claim 1, wherein the gas in the vacuum chamber includes at least one reactive gas.

10. Process according to claim 1, including conducting direct current to the anode via a direct current anode voltage supply unit, wherein the electron-beam gun has an emission current, and wherein a current equivalent to the emission current of the electron-beam gun flows through the direct current anode voltage supply unit.

11. Process according to claim 1, including supplying direct current to the anode at a voltage of at least 250 V.

12. Process according to claim 1, including coating a plastic film with a non-electrically conductive material.

13. Process according to claim 1, including maintaining the gas discharge throughout the entire deposition process.

14. Process according to claim 1, including coating deposition rates of at least 0.01 μ

m/sec.

15. Process according to claim 1, including moving the substrate surface during deposition.

16. Process according to claim 1, including applying a film over deposited inorganic material.

17. Process according to claim 1, including wherein said gun is a single electron-beam gun.