Process and device for coating a substrate surface with vaporized inorganic material
First Claim
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1. Process for coating, which comprises:
- providing a substrate surface and an anode spaced therefrom in a vacuum chamber with gas therein;
coating said substrate surface with a layer of inorganic material by vaporizing said inorganic material in said vacuum chamber evacuated to 10-3 mbar or less, including bombarding said inorganic material with an electron beam from an electron-beam gun to vaporize said inorganic material, and wherein said gun creates an electrostatic charge, and wherein there is a point of incidence (A) between the inorganic material and the electron beam, and depositing the vaporized inorganic material on the substrate surface as a coating;
wherein gas discharge is created in the gas and in the vaporized inorganic material between the point of incidence (A) of the electron beam on the inorganic material to be vaporized and said anode such that the electrostatic charge created by the electron-beam gun flows off via the anode;
with said anode having an electrical conductivity and a surface, and wherein, in order to maintain the electrical conductivity at the surface of the anode and to prevent the anode from being coated, the anode is heated to a temperature exceeding that at which the vaporized inorganic material condenses;
with the voltage applied to said electron-beam gun being at least 5 kV and wherein the substrate is a non-electrically conductive substrate and said coating is a non-electrically conductive material.
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Abstract
In a process for coating a substrate surface with a layer of inorganic material, the inorganic material is vaporised in a vacuum chamber evacuated to at least 10-3 mbar by bombarding with an electron beam from a high voltage electron-beam gun and deposited on the substrate surface. Gas discharging is created between the point of incidence (A) of the electron beam on the inorganic material to be vaporised and an anode such that the electrostatic charge created by the high voltage electron-beam gun flows off via the anode. This way damage to the substrate, which may arise as a result discharging phenomena, can be effectively avoided.
19 Citations
17 Claims
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1. Process for coating, which comprises:
- providing a substrate surface and an anode spaced therefrom in a vacuum chamber with gas therein;
coating said substrate surface with a layer of inorganic material by vaporizing said inorganic material in said vacuum chamber evacuated to 10-3 mbar or less, including bombarding said inorganic material with an electron beam from an electron-beam gun to vaporize said inorganic material, and wherein said gun creates an electrostatic charge, and wherein there is a point of incidence (A) between the inorganic material and the electron beam, and depositing the vaporized inorganic material on the substrate surface as a coating;
wherein gas discharge is created in the gas and in the vaporized inorganic material between the point of incidence (A) of the electron beam on the inorganic material to be vaporized and said anode such that the electrostatic charge created by the electron-beam gun flows off via the anode;
with said anode having an electrical conductivity and a surface, and wherein, in order to maintain the electrical conductivity at the surface of the anode and to prevent the anode from being coated, the anode is heated to a temperature exceeding that at which the vaporized inorganic material condenses;
with the voltage applied to said electron-beam gun being at least 5 kV and wherein the substrate is a non-electrically conductive substrate and said coating is a non-electrically conductive material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
- providing a substrate surface and an anode spaced therefrom in a vacuum chamber with gas therein;
Specification