Advanced semiconductor emitter technology photocathodes

• US 5,804,833 A
• Filed: 10/10/1996
• Issued: 09/08/1998
• Est. Priority Date: 10/10/1996
• Status: Expired due to Term

• Current Assignee: Continental Autonomous Mobility US LLC (Continental AG)
• Original Assignee: Advanced Scientific Concepts, Inc.
• Inventors: Bailey, Howard W., Stettner, Roger
• Primary Examiner(s): MINTEL, WILLIAM A
• Application Number:
  US08/722,448
• Time in Patent Office: 698 Days
• Field of Search: 257/10, 257/11, 257/442, 257/443, 257/466, 313/309, 313/336, 313/351, 313/500, 313/501
• US Class Current: 257/10
• CPC Class Codes: G01T 1/24 with semiconductor detectors
• CPC Class Codes: G01T 1/28 with secondary-emission detectors
• CPC Class Codes: H01J 1/304 Field-emissive cathodes
• CPC Class Codes: H01J 1/34 Photo-emissive cathodes H01J1/35 takes precedence
• CPC Class Codes: H01J 31/50 Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output

Abstract

A detector to be used for detecting photons from the visible to far infrared spectrum is described. The detector uses unique photocathodes called Advanced Semiconductor Emitter Technology (ASET) as its critical element for converting the detected photons to electrons which are emitted into a vacuum. The electron is multiplied by accelerations and collisions creating a signal larger than the sensor noise and thus allowing the photon to be detected. ASET is/composed of distinct detector and emitter technologies.

Claims

1. A photon detector comprising

a photocathode device for absorbing a photon of light and emitting an electron,

amplification means to multiply the number of electrons, and

readout means to convert the electrons into an electrical signal,

said photocathode device comprising

detector structure means for absorbing the photons and creating an electron-hole pair,

voltage means for creating electric fields within and outside the device to separate the electron from the hole and aid in electron emission,

electrical contacts and shields to create and shape the electric fields from the voltage means,

emitter structure means comprising

cone-shaped emitters to transfer the electron from the inside of the device to the outside of the photocathode device.

2. The high sensitivity photon detector of claim 1, wherein the amplification means is a microchannel plate.

3. The high sensitivity photon detector of claims 1, wherein the amplification means is a digicon.

4. The high sensitivity photon detector of claim 1, wherein the amplification means is a photomultiplier tube.

5. The photon detector of claim 1, wherein the amplification means is electric field acceleration of the electron and subsequent collision with a solid-state device.

6. The high sensitivity photon detector of claim 1, wherein the amplification means is electric field acceleration of the emitted electron and subsequent collision with a solid-state pixel array.

7. The high sensitivity photon detector of claim 1, wherein the amplification means is electric field acceleration of the electron and subsequent collision with a phosphor or scintillator.

21. The device for absorbing a photon of light and emitting an electron of claim 7, wherein the detector structure means and the emitter structure means are not separated and are made of the same material.

33. The device for absorbing a photon of light and emitting an electron of claim 1, wherein an electric field shield contact means is fabricated on part of the emitter structure outside surface to reduce the internal field between the grid electrode and the emitter surface.

8. A photocathode device for absorbing a photon of light and emitting an electron, comprising

detector structure means for absorbing the light and creating an electron-hole pair,

voltage means for creating electric fields within and outside the device to separate the electron from the hole and aid in electron emission,

electrical contacts and shields to create and shape the electric fields from the voltage means,

emitter structure means comprising cone-shaped emitters to transfer the electron from the inside of the device to the outside of the device.

9. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means is a solid-state detector.

10. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means is silicon.

11. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the solid-state detector structure means is silicon.

12. The device for absorbing a photon of light and emitting an electron of claim 8, wherein

the detector structure means is silicon which is depleted by the voltage means and electrical contact means to greater than 1 μ

m but less than 0.1 cm.

13. The device for absorbing a photon of light and emitting an electron of claim 8, wherein

the detector structure means is silicon which is depleted by the voltage means and electrical contact means to a depth such as to make it an absorber of Nd:

YAG photons.

14. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means is Mercury Cadmium Telluride.

15. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means is an Impurity Band Conduction detector.

16. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means is a silicon Impurity Band Conduction detector.

17. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means is coupled to the emitter structure means by a grid electrode.

18. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means is efficiently coupled to the emitter structure means through a low resistivity of the detector material.

22. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the material of the emitter structure means is epitaxially grown on the material of the detector structure means.

27. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the device is made from a single solid-state wafer.

28. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the device is made from a single silicon wafer.

29. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means and the emitter structure means are epitaxially grown on a single solid-state wafer.

30. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means and the emitter structure means are epitaxially grown on a single silicon wafer.

31. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means comprises an electrical contact implanted in the solid state wafer.

32. The device for absorbing a photon of light and emitting an electron of claim 8, wherein the detector structure means electrical contact is epitaxially grown on the solid state wafer.

19. A photocathode device for absorbing a photon of light and emitting an electron, comprising

detector structure means for absorbing the light and creating an electron-hole pair,

voltage means for creating electric fields within and outside the device to separate the electron from the hole and aid in electron emission,

electrical contacts and shields to create and shape the electric fields from the voltage means,

emitter structure means to transfer the electron from the inside of the device to the outside of the device,

wherein the detector structure means is separated from the emitter structure means by an ion-implanted grid electrode.

20. A photocathode device for absorbing a photon of light and emitting an electron, comprising

detector structure means for absorbing the light and creating an electron-hole pair,

voltage means for creating electric fields within and outside the device to separate the electron from the hole and aid in electron emission,

electrical contacts and shields to create and shape the electric fields from the voltage means,

emitter structure means to transfer the electron from the inside of the device to the outside of the device,

wherein the detector structure means is separated from the emitter structure means by an epitaxially-grown grid electrode.

23. A photocathode device for absorbing a photon of light and emitting an electron, comprising

detector structure means for absorbing the light and creating an electron-hole pair,

voltage means for creating electric fields within and outside the device to separate the electron from the hole and aid in electron emission,

electrical contacts and shields to create and shape the electric fields from the voltage means,

emitter structure means to transfer the electron from the inside of the device to the outside of the device,

wherein the emitter structure comprises cone-shaped emitters etched into the detector substrate.

24. The device for absorbing a photon of light and emitting an electron of claim 23, wherein the detector substrate is an epitaxially grown layer.

25. A photocathode device for absorbing a photon of light and emitting an electron, comprising

detector structure means for absorbing the light and creating an electron-hole pair,

voltage means for creating electric fields within and outside the device to separate the electron from the hole and aid in electron emission,

electrical contacts and shields to create and shape the electric fields from the voltage means,

emitter structure means to transfer the electron from the inside of the device to the outside of the device,

wherein the emitter structure means comprises cone-shaped emitters which are greater than 3 μ

m and less than 20 μ

m tall.

26. A photocathode device for absorbing a photon of light and emitting an electron, comprising

detector structure means for absorbing the light and creating an electron-hole pair,

voltage means for creating electric fields within and outside the device to separate the electron from the hole and aid in electron emission,

electrical contacts and shields to create and shape the electric fields from the voltage means,

emitter structure means to transfer the electron from the inside of the device to the outside of the device,

wherein the emitter structure means comprises cone-like emitters which are greater than 3 μ

m and less than 20 μ

m in diameter.