Method and apparatus for cryogenically cooling a deposition chamber

• US 5,806,319 A
• Filed: 03/13/1997
• Issued: 09/15/1998
• Est. Priority Date: 03/13/1997
• Status: Expired due to Term

• Current Assignee: Specialty Coating Systems Inc.
• Original Assignee: John Wary, Roger A. Olson, Walter Swanson, William F. Beach
• Inventors: Olson, Roger A., Swanson, Walter, Wary, John, Beach, William F.
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US08/816,295
• Time in Patent Office: 551 Days
• Field of Search: 62/55.5, 417/901
• US Class Current: 62/55.5
• CPC Class Codes: B05D 1/60 Deposition of organic layers from vapour phase vapour phase deposition in general C23C14/00, C23C16/00
• CPC Class Codes: C23C 14/541 Heating or cooling of the substrates
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

A method and apparatus for depositing parylene monomer within the interior of a deposition chamber of a parylene deposition system. In certain embodiments, the method comprises the steps of: (a) introducing a cryogenic fluid into the interior of the deposition chamber to cool the surface of the substrate; and (b) introducing the parylene monomer into the interior of the chamber to deposit the parylene monomer onto the surface of the substrate. In some embodiments, the apparatus comprises: a deposition chamber; a pumping system, a source of cryogenic fluid, a gas source and at least one support mount disposed within the interior of the deposition chamber. The pumping system reduces the pressure of the interior of the deposition chamber, and the pumping system is in fluid communication with the interior of the deposition chamber. The source of cryogenic fluid is in fluid communication with the interior of the deposition chamber. The gas source is in fluid communication with the interior of the deposition chamber. Optionally, the method or apparatus may include the use of a load lock chamber.

Claims

1. A method of depositing a gas onto a surface of a substrate, the substrate being disposed within an interior of a deposition chamber, the method comprising the steps of:

(a) introducing a cryogenic fluid into the interior of the deposition chamber to cool the surface of the substrate; and

(b) introducing the gas into the interior of the chamber to deposit the gas onto the surface of the substrate.

2. The method of claim 1, wherein step (a) includes cooling the surface of the substrate to a temperature of at most about 40°

C.

3. The method of claim 1, wherein step (a) includes cooling the surface of the substrate to a temperature of at most about 10°

C.

4. The method of claim 1, wherein step (a) includes cooling the surface of the substrate to a temperature of at most about -15°

C.

5. The method of claim 1, further comprising, between steps (a) and (b), the step of heating at least some portions of the interior of the deposition chamber other than the surface of the substrate.

6. The method of claim 5, wherein the step of heating includes heating the portions of the interior of the deposition chamber other than the surface of the substrate to a temperature at least about 10°

C. higher than a temperature of the surface of the substrate.

7. The method of claim 5, wherein the step of heating includes heating the portions of the interior of the deposition chamber other than the surface of the substrate to a temperature of at least about 20°

C.

8. The method of claim 5, wherein the step of heating includes heating the portions of the interior of the deposition chamber other than the surface of the substrate to a temperature of from about 20°

C. to about 40°

C.

9. The method of claim 1, further comprising, between steps (a) and (b), the step of heating walls of the interior of the deposition chamber to a temperature at least about 20°

C. higher than a temperature of the surface of the substrate.

10. The method of claim 9, wherein step (a) includes cooling the surface of the substrate to a temperature of at most about 40°

C.

11. The method of claim 10, wherein step (a) introduces substantially no moisture into the interior of the deposition chamber.

12. The method of claim 1, wherein step (a) introduces substantially no moisture into the interior of the deposition chamber.

13. The method of claim 1, further comprising, between step (a) and step (b), the step of gasifying the cryogenic fluid so that substantially no liquid cryogenic fluid remains in the interior of the deposition chamber.

14. The method of claim 13, further comprising, after the step gasifying, the step of removing the cryogenic fluid from the interior of the deposition chamber.

15. The method of claim 1, further comprising, between step (a) and step (b), the step of removing the cryogenic fluid from the interior of the deposition chamber.

16. A method of depositing parylene monomer within an interior of a deposition chamber of a parylene deposition system, the method comprising the steps of:

(a) introducing a cryogenic fluid into the interior of the deposition chamber so that the cryogenic fluid cools at least a surface of a substrate disposed within the interior of the deposition chamber to a reduced temperature;

(b) heating walls of the interior of the deposition chamber to a temperature greater than the reduced temperature of the surface of the substrate; and

(c) introducing the parylene monomer into the interior of the deposition chamber so that the parylene monomer preferentially deposits onto the surface of the substrate.

17. The method of claim 16, wherein step (a) cools the surface of the substrate to a reduced temperature of at most about 40°

C.

18. The method of claim 17, wherein step (b) heats the walls of the interior of the deposition chamber to a temperature at least about 20°

C. higher than a temperature of the surface of the substrate.

19. The method of claim 18, wherein step (c) includes the steps of:

gasifying parylene dimer to form gasified parylene dimer; and

cleaving the gasified parylene dimer to form the parylene monomer.

20. The method of claim 19, wherein the step of gasifying includes vaporizing the parylene dimer.

21. The method of claim 19, wherein the step of cleaving include pyrolyzing the parylene dimer.

22. The method of claim 19, wherein the step of cleaving includes using a plasma.

23. The method of claim 16, wherein step (a) includes cooling the surface of each of a plurality of substrates disposed within the interior of the deposition chamber.

24. The method of claim 16, further comprising, between steps (a) and (b), the step gasifying the cryogenic fluid so that substantially no liquid cryogenic fluid remains in the interior of the deposition chamber.

25. The method of claim 24, further comprising, after the step gasifying, the step of removing the cryogenic fluid from the interior of the deposition chamber.

26. The method of claim 16, wherein step (a) includes cooling the surface of an automobile part.

27. The method of claim 16, further comprising, between step (a) and step (b), the step of removing the cryogenic fluid from the interior of the deposition chamber.

28. An apparatus for depositing a gas, comprising:

a deposition chamber having an interior and an exterior;

a pumping system for reducing a pressure of the interior of the deposition chamber, the pumping system being in fluid communication with the interior of the deposition chamber;

a support mount for a substrate, the support mount being disposed within the interior of the deposition chamber;

a source of cryogenic fluid in fluid communication with the interior of the deposition chamber; and

a gas source in fluid communication with the interior of the deposition chamber.

29. The apparatus of claim 28, wherein the pumping system comprises a vacuum pump.

30. The apparatus of claim 28, further comprising a plurality of support mounts for mounting a substrate.

31. The apparatus of claim 28, wherein the source of the cryogenic fluid comprises a tank of liquid nitrogen.

32. The apparatus of claim 28, wherein the source of cryogenic fluid comprises a container of liquid carbon dioxide.

33. The apparatus of claim 28, wherein the gas source is a source of parylene monomer.

34. The apparatus of claim 33, wherein the gas source comprises:

a chamber for gasifying parylene dimer to form gasified parylene dimer; and

a chamber for cleaving the gasified parylene dimer to form the parylene monomer, the chamber for cleaving being in fluid communication with the chamber for gasifying.

35. The apparatus of claim 28, further comprising a heater in thermal communication with portions of the interior of the deposition chamber other than the support.

36. The apparatus according to claim 28, further comprising a load lock chamber capable of being placed in fluid communication with the deposition chamber.

37. The apparatus according to claim 36, further comprising a seal disposed between the load lock chamber and the deposition chamber.

38. The apparatus according to claim 28, further comprising a load lock chamber capable of being placed in fluid communication with the first deposition chamber.

39. The apparatus according to claim 38, further comprising a seal disposed between the load lock chamber and the first deposition chamber.

40. An apparatus for depositing parylene monomer, comprising

a first deposition chamber having an interior and an exterior;

a vacuum pump in fluid communication for reducing a pressure of the interior of the first deposition chamber, the vacuum pump being in fluid communication with the interior of the first deposition chamber;

a support mount for mounting a substrate, the support being disposed within the interior of the first deposition chamber;

a source of a cryogenic fluid in fluid communication with the interior of the first deposition chamber; and

a source of parylene monomer in fluid communication with the interior of the deposition chamber.

41. The apparatus of claim 40, further comprising a plurality of support mounts for a substrate.

42. The apparatus of claim 40, wherein the source of cryogenic fluid comprises a tank of liquid nitrogen.

43. The apparatus of claim 40, wherein the source of cryogenic fluid comprises liquid carbon dioxide.

44. The apparatus of claim 40, wherein the source of parylene monomer comprises:

a chamber for gasifying parylene dimer to form gasified parylene dimer; and

a chamber for cleaving the gasified parylene dimer to form the parylene monomer, the chamber for cleaving being in fluid communication with the chamber for gasifying.

45. The apparatus of claim 40, wherein the source of parylene monomer comprises:

a vaporization chamber for forming vaporized parylene dimer; and

a pyrolysis chamber for forming the parylene monomer, the pyrolysis chamber being in fluid communication with the vaporization chamber.

46. The apparatus of claim 45, wherein the source of parylene monomer further comprises a post-pyrolysis chamber in fluid communication with the pyrolysis chamber and the first deposition chamber.

47. The apparatus of claim 40, further comprising a heater in thermal communication with the interior of the first deposition chamber, the heater being thermally isolated from the support mount.

48. The apparatus of claim 40, further comprising a second deposition chamber in fluid communication with the source of cryogenic fluid.

49. The apparatus of claim 40, wherein the at least one substrate comprises an automobile part.

50. A method of depositing a gas onto a surface of a substrate, the substrate being disposed within an interior of a deposition chamber, the method comprising the steps of:

(a) cooling the surface of the substrate without clamping the substrate to a support; and

(b) introducing the gas into the interior of the chamber to deposit the gas onto the surface of the substrate.

51. A method of depositing a gas onto a surface of a substrate, the substrate being disposed within an interior a load lock chamber, the method comprising the steps of:

(a) introducing a cryogenic fluid into the interior of the load lock chamber to cool the surface of the substrate to form a cooled substrate;

(b) transferring the cooled substrate to an interior of a deposition chamber; and

(c) introducing the gas into the interior of the deposition chamber to deposit the gas onto the surface of the substrate.

52. The method according to claim 51, further comprising the step of:

introducing a cryogenic fluid into the interior of the deposition chamber.

53. The method according to claim 52, further comprising the step of:

heating walls of the deposition chamber to a temperature greater than the temperature of the cooled substrate.