Acceleration sensing device on a support substrate and method of operation

• US 5,806,365 A
• Filed: 04/30/1996
• Issued: 09/15/1998
• Est. Priority Date: 04/30/1996
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Koury, Daniel N. Jr., Zunino, Helen M.
• Primary Examiner(s): Oda, Christine K.
• Application Number:
  US08/640,267
• Time in Patent Office: 868 Days
• Field of Search: 73/510, 73/511, 73/514.01, 73/514.12, 73/514.16, 73/514.32, 73/514.38, 73/862.381, 73/862.473, 73/862.52, 73/724, 73/754 , 73/504.13
• US Class Current: 73/514.16
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/0888 for indicating angular acceleration
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass

Abstract

A sensor (10) is capable of detecting linear acceleration in the three Cartesian directions and the angular acceleration about three Cartesian axes. The sensor (10) has a conductive layer (32) that is free to move or rotate in any direction. A first, second, and third set of conductors are used to sense and quantify the acceleration of the conductive layer (32). The sensor (10) can also be operated as a closed loop system with the addition of a fourth set of conductors.

Claims

1. An acceleration sensing device on a support substrate comprising:

a first set of conductors overlying the support substrate, the first set of conductors generally defining a first plane;

a layer of conductive material overlying the first set of conductors and generally defining a second plane that is substantially parallel to the first plane, wherein the layer of conductive material has edges;

a second set of conductors arranged about a first axis of motion, overlying the support substrate, and having a first conductor and a second conductor that are substantially equidistant from each other along the first axis of motion, wherein the first conductor and the second conductor of the second set of conductors are separated from the edges of the layer of conductive material by a first distance and a second distance, respectively; and

a third set of conductors arranged about a second axis of motion, overlying the support substrate, and having a first conductor and a second conductor that are substantially equidistant from each other along the second axis of motion, wherein the first conductor and the second conductor of the third set of conductors are separated from the edges of the layer of conductive material by a third distance and a fourth distance, respectively.

2. The acceleration sensing device of claim 1 further comprising a fourth set of conductors overlying the layer of conductive material, wherein the fourth set of conductors defines a third plane that is substantially parallel to the second plane.

3. The acceleration sensing device of claim 2 wherein the fourth set of conductors is substantially directly over the first set of conductors.

4. The acceleration sensing device of claim 1 wherein the first set of conductors comprises a material selected from the group consisting of doped polysilicon, aluminum, nickel, copper, tungsten, and titanium.

5. The acceleration sensing device of claim 1 wherein the layer of conductive material is overlying at least a portion of the second set of conductors.

6. The acceleration sensing device of claim 5 wherein the layer of conductive material is overlying at least a portion of the third set of conductors.

7. The acceleration sensing device of claim 1 wherein the first set of conductors includes at least three conductors.

8. The acceleration sensing device of claim 1 wherein the first distance is less than 3 microns.

9. The acceleration sensing device of claim 8 wherein the first distance and the second distance are substantially equal.

10. The acceleration sensing device of claim 9 wherein the third distance and the fourth distance are substantially equal to the first distance.

11. The acceleration sensing device of claim 1 wherein the first axis of motion and the second axis of motion are orthogonal to each other.

12. The acceleration sensing device of claim 1 wherein the layer of conductive material is movable in a first direction along a first orthogonal axis, a second direction along a second orthogonal axis, and a third direction along a third orthogonal axis, and the layer of conductive material is movable around the first orthogonal axis to sense a first rotational acceleration, is movable around the second orthogonal axis to sense a second rotation acceleration, and is movable around the third orthogonal axis to sense a third rotational acceleration.

13. An apparatus comprising:

a support substrate;

a first set of conductors overlying the support substrate, the first set of conductors generally defining a first plane;

a layer of conductive material overlying the first set of conductors and generally defining a second plane that is substantially parallel to the first plane;

a second set of conductors arranged about a first axis of motion, overlying the support substrate, and having a first conductor and a second conductor that are substantially equidistant from each other along the first axis of motion; and

a third set of conductors arranged about a second axis of motion, overlying the support substrate, and having a first conductor and a second conductor that are substantially equidistant from each other along the second axis of motion, wherein the first set of conductors and the second set of conductors are physically separated from the layer of conductive material.

14. The apparatus of claim 13 wherein the third set of conductors is physically separated from the layer of conductive material.

15. The apparatus of claim 13 wherein the first set of conductors, the second set of conductors, and the third set of conductors each have at least two conductors.

16. The apparatus of claim 15 wherein the first set of conductors, the second set of conductors, and the third set of conductors are between the support substrate and the layer of conductive material.

17. An acceleration sensing device on a support substrate comprising:

a first set of conductors overlying the support substrate;

a layer of conductive material overlying the first set of conductors and, wherein the layer of conductive material has edges;

a second set of conductors arranged about a first axis of motion, overlying the support substrate, and having a first conductor and a second conductor that are substantially equidistant from each other along the first axis of motion, wherein the first conductor and the second conductor of the second set of conductors are separated from the edges of the layer of conductive material by a first distance and a second distance, respectively; and

a third set of conductors arranged about a second axis of motion, overlying the support substrate, and having a first conductor and a second conductor that are substantially equidistant from each other along the second axis of motion, wherein the first conductor and the second conductor of the third set of conductors are separated from the edges of the layer of conductive material by a third distance and a fourth distance, respectively.

18. The acceleration sensing device of claim 17 wherein the first set of conductors has at least two conductors.

19. The acceleration sensing device of claim 17 wherein the second set of conductors and the third set of conductors are between the layer of conductive material and the support substrate.

20. The acceleration sensing device of claim 19 wherein the first set of conductors is between the layer of conductive material and the support substrate.