Eccentric capacitive pressure sensor
First Claim
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1. A capacitive pressure sensor, comprising:
- an elongated hollow tubular member extending from an open end for receiving electrical connections to a sealed end, and having an elongated hollow member inner wall along its length deflectable by pressure;
a bar, extending eccentrically inside the elongated hollow member and having a bar outer wall attached to the elongated hollow member inner wall along at least a portion of its length, the elongated hollow member inner and bar outer walls having shapes which form a gap therebetween deflectable with pressure; and
an output related to deflection of the gap due to pressure applied to the elongated hollow member.
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Abstract
An elongated pressure sensor includes an inner bar carried within an elongated hollow member. A gap formed between the bar and elongated hollow member changes shape in response to a pressure applied to the elongated hollow member. Capacitive electrodes on the elongated hollow member and bar have a capacitance which changes in response to applied pressure. The sensor is adapted for coupling to a multifunction body.
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Citations
17 Claims
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1. A capacitive pressure sensor, comprising:
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an elongated hollow tubular member extending from an open end for receiving electrical connections to a sealed end, and having an elongated hollow member inner wall along its length deflectable by pressure; a bar, extending eccentrically inside the elongated hollow member and having a bar outer wall attached to the elongated hollow member inner wall along at least a portion of its length, the elongated hollow member inner and bar outer walls having shapes which form a gap therebetween deflectable with pressure; and an output related to deflection of the gap due to pressure applied to the elongated hollow member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A pressure sensing module, comprising:
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an elongated hollow tubular pressure sensor having a process pressure sensing end that is sealed and a reference pressure sensing end that is open providing an electrical pressure sensor signal, the sensor including an elongated eccentric bar carried therein; an electrical feedthrough that is sealed, electrically connected to the sensor, feeding the pressure sensor signal outside the pressure sensing module; and a multifunction body having a chamber sealed by the electrical feedthrough and providing a reference pressure to the open sensor end, a well receiving the process pressure sensing end and opening outwardly from the module for connection to a pressurized process fluid, and a sensor passageway extending between the chamber and the well shaped to sealingly receive the pressure sensor. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification