Heated pressure transducer assembly

• US 5,808,206 A
• Filed: 07/15/1996
• Issued: 09/15/1998
• Est. Priority Date: 01/16/1996
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Navarro, Paul W., Pandorf, Robert C.
• Primary Examiner(s): Dombroske, George M.
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/679,952
• Time in Patent Office: 792 Days
• Field of Search: 73/700, 73/715, 73/723-728, 73/753, 73/756
• US Class Current: 73/756
• CPC Class Codes: B32B 2255/10 on synthetic resin layer or on natural or synthetic rubber layer
• CPC Class Codes: B32B 2255/205 Metallic coating
• CPC Class Codes: B32B 2262/0269 Aromatic polyamide fibres
• CPC Class Codes: B32B 2262/101 Glass fibres
• CPC Class Codes: B32B 2307/304 Insulating
• CPC Class Codes: B32B 27/12 next to a fibrous or filamentary layer
• CPC Class Codes: B32B 27/281 comprising polyimides
• CPC Class Codes: B32B 5/022 Non-woven fabric
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 19/142 Multiple part housings
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: Y10T 442/657 Vapor, chemical, or spray deposited metal layer
• CPC Class Codes: Y10T 442/67 Multiple nonwoven fabric layers composed of the same inorganic strand or fiber material

Abstract

The disclosed pressure transducer assembly includes an external enclosure, a thermal shell disposed within the external enclosure, and a pressure sensor disposed within the thermal shell. The pressure sensor senses the gas or vapor pressure present in a tube coupling the sensor to a source of pressurized gas or vapor. The assembly includes a device for heating the thermal shell, and thermal insulation is disposed between the thermal shell and the external enclosure. The thermal insulation includes a plurality of metalized high temperature films stacked one on top of another and a plurality of spacer layers, each of the spacer layers being disposed between adjacent ones of the metalized high temperature films.

Claims

1. A pressure transducer assembly comprising:

(A) an external enclosure defining an interior cavity;

(B) a thermal shell, disposed within said interior cavity, for defining a sensor cavity;

(C) a pressure sensor, disposed within said sensor cavity, and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at said input port;

(D) means for coupling a source of said gas or vapor to said input port;

(E) temperature control means for applying heat to and controlling the temperature of said thermal shell;

(F) a thermal insulator disposed between said external enclosure and said thermal shell, said thermal insulator including;

(i) a plurality of metalized high temperature films stacked one on top of another; and

(ii) a plurality of spacer layers, each of said spacer layers being disposed between adjacent ones of said metalized high temperature films.

2. An assembly according to claim 1, wherein one or more of said spacer layers comprises a non-woven glass mat.

3. An assembly according to claim 1, wherein one or more of said spacer layers comprises a non-woven E glass mat.

4. An assembly according to claim 1, wherein one or more of said spacer layers comprises aramid fibers.

5. An assembly according to claim 1, wherein one or more of said spacer layers comprises silicone rubber.

6. An assembly according to claim 1, wherein one or more of said high temperature films comprises polyimide.

7. An assembly according to claim 1, wherein one or more of said high temperature films comprises aluminized polyimide.

8. A pressure transducer assembly comprising:

(A) an external enclosure defining an interior cavity;

(B) a thermal shell, disposed within said interior cavity, for defining a sensor cavity;

(C) a pressure sensor, disposed within said sensor cavity, and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at said input port;

(D) means for coupling a source of said gas or vapor to said input port;

(E) temperature control means for applying heat to and controlling the temperature of said thermal shell;

(F) a thermal insulator disposed between said external enclosure and said thermal shell, said thermal insulator comprising aramid fibers.

9. A pressure transducer assembly comprising:

(A) an external enclosure defining an interior cavity;

(B) a thermal shell, disposed within said interior cavity, for defining a sensor cavity;

(C) a pressure sensor, disposed within said sensor cavity, and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at said input port;

(D) means for coupling a source of said gas or vapor to said input port;

(E) temperature control means for applying heat to and controlling the temperature of said thermal shell;

(F) a thermal insulator disposed between said external enclosure and said thermal shell, said thermal insulator comprising a plurality of crinkled metalized plastic sheets.

10. An assembly according to claim 9, wherein one or more of said plastic sheets comprises polyester.

11. An assembly according to claim 9, wherein one or more of said metalized plastic sheets comprises aluminized polyester.

12. A pressure sensor comprising:

(A) a diaphragm;

(B) a flange defining a first principal face, a second principal face, and a bore extending through said flange from said first principal face to said second principal face, at least a portion of said bore being characterized by an inner perimeter;

(C) a hollow tube extending from a first end to a second end, said first end being characterized by an outer perimeter substantially equal to said bore inner perimeter, said tube including a first thinned region proximal to said first end and characterized by an outer perimeter smaller than said bore inner perimeter;

(D) means for affixing said tube to said flange, said first end being disposed inside said bore, said first thinned region extending through at least a portion of said bore, and said tube extending beyond said first principal face; and

(E) means for affixing said diaphragm to said flange second principal face so that at least a portion of said diaphragm may be displaced in response to gas or vapor pressure in said hollow tube.

13. A sensor according to claim 12, further including an electrode spaced apart from said diaphragm, said electrode and said diaphragm forming a variable capacitor, the capacitance provided by said variable capacitor being representative of the position of said diaphragm.

14. A sensor according to claim 13, wherein said capacitance is representative of the gas or vapor pressure in said hollow tube.

15. A pressure transducer assembly, comprising:

(A) a pressure sensor including;

(i) a diaphragm;

(ii) a flange defining a first principal face, a second principal face, and a bore extending through said flange from said first principal face to said second principal face, at least a portion of said bore being characterized by an inner perimeter;

(iii) a hollow tube extending from a first end to a second end, said first end being characterized by an outer perimeter substantially equal to said bore inner perimeter, said tube including a first thinned region proximal to said first end and characterized by an outer perimeter smaller than said bore inner perimeter;

(iv) means for affixing said tube to said flange, said first end being disposed inside said bore, said first thinned region extending through at least a portion of said bore, and said tube extending beyond said first principal face; and

(v) means for affixing said diaphragm to said flange second principal face so that at least a portion of said diaphragm may be displaced in response to gas or vapor pressure in said hollow tube; and

(B) an external enclosure defining an interior cavity within said external enclosure, said diaphragm and said flange and a portion of said tube being disposed in said interior cavity, said external enclosure defining a first aperture in said external enclosure, said hollow tube extending through said first aperture so that said second end of said hollow tube is disposed outside said interior cavity.

16. An assembly according to claim 15, further including a thermal shell disposed within said interior cavity for defining a sensor cavity, said diaphragm and said flange and a portion of said tube being disposed in said sensor cavity, said thermal shell defining a second aperture, said hollow tube extending through said second aperture.

17. An assembly according to claim 16, further including means for heating said thermal shell.

18. An assembly according to claim 15, said pressure sensor further including an electrode spaced apart from said diaphragm, said electrode and said diaphragm forming a variable capacitor, the capacitance provided by said variable capacitor being representative of the position of said diaphragm.

19. An assembly according to claim 18, wherein said capacitance is representative of the gas or vapor pressure in said hollow tube.

20. An assembly according to claim 19, further comprising means for sensing said capacitance and for generating a signal representative of said capacitance.

21. A pressure transducer assembly comprising:

(A) an external enclosure defining an interior cavity within said external enclosure, said external enclosure further defining a first aperture in said external enclosure;

(B) a thermal shell comprising copper and defining a sensor cavity within said thermal shell, said thermal shell further defining a second aperture in said thermal shell, said thermal shell being disposed within said interior cavity;

(C) a pressure sensor, disposed within said sensor cavity, and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at said input port;

(D) a tube for defining a conduit for the vapor or gas to said input port of said sensor, said tube extending through said first and second apertures and having a first end coupled to the input port of the sensor and a second end positioned outside the external enclosure;

(E) first temperature control means for applying heat to and controlling the temperature of said thermal shell;

(F) a thermal insulator disposed between said external enclosure and said thermal shell; and

(G) means for sensing said parameter value and generating therefrom a transducer output signal representative of said pressure at said input port.

22. An assembly according to claim 21, wherein said thermal insulator comprises:

(A) a plurality of metalized high temperature films stacked one on top of another; and

(B) a plurality of spacer layers, each of said spacer layers being disposed between adjacent ones of said metalized high temperature films.

23. An assembly according to claim 21, further comprising second temperature control means for controlling the temperature of said sensing means.

24. An assembly according to claim 21, further comprising second temperature control means for controlling the temperature of said tube, said second temperature control means including means, proximal to and in thermal contact with at least a portion of the section of the tube extending between said first end and said first aperture, for providing heat transfer with said tube.

25. An assembly according to claim 21, further comprising auxiliary heater means disposed in said sensor cavity proximal to said sensor for heating said sensor.