Non-contacting micromechanical optical switch

• US 5,808,780 A
• Filed: 06/09/1997
• Issued: 09/15/1998
• Est. Priority Date: 06/09/1997
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: McDonald, Terrance Gus
• Primary Examiner(s): Ben, Loha
• Application Number:
  US08/871,308
• Time in Patent Office: 463 Days
• Field of Search: 359/318, 359/290, 359/291, 359/292, 359/295, 359/221, 359/224, 359/230, 359/245, 310/328, 310/333, 310/365, 310/366
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micromechanical optical switch (30). A reflective surface with two angled reflective surfaces (32,34) positioned opposite a micromechanical device (12). The micromechanical device is positioned such that light input along a path (36) to a first (32) of the two angled reflective surfaces is reflected to the micromechanical device. The micromechanical device then reflects the light to the second (34) of the angled surfaces to be output along another path (38a, 38b). The path (38a, 38b) that the second angled surface (34) outputs the light along is selected depending upon the position of the micromechanical device'"'"'s reflective member (14). The reflective member (14) deflects from at least one hinge (22) to one of several positions. The number of positions available to the reflective member (14) depends upon the voltage applied to the electrodes (27a, 27b, 27c, 27d). The reflective member (14) makes no contact with any other surfaces, and thereby always returns to a know position upon loss of power.

Claims

1. A micromechanical optical switch, comprising:

a reflective surface having two angled reflective surfaces;

a micromechanical device, comprising;

a reflective member, supported by at least one hinge;

at least one electrode underneath said member, such that when said electrode is activated, said member deflects towards said electrode, but does not contact any surface; and

said micromechanical device positioned opposite said reflective surface such that light impinging upon a first of said angled reflective surfaces directs light to said reflective member of said micromechanical device and a second of said angled reflective surfaces receives light from said micromechanical device, wherein said second angled reflective surface receives light at a position dependent upon the deflection of said reflective member.

2. The micromechanical optical switch of claim 1 wherein said reflective member is supported by four hinges.

3. The micromechanical optical switch of claim 1 wherein said at least one electrode further comprises two electrodes.

4. The micromechanical optical switch of claim 3 wherein the voltage on each electrode is adjusted to fine tune said position of said reflected light.

5. The micromechanical optical switch of claim 3 wherein said electrodes are triangular.

6. The micromechanical optical switch of claim 3 wherein said electrodes are rectangular.

7. The micromechanical optical switch of claim 1 wherein said at least one electrode further comprises four electrodes.

8. The micromechanical optical switch of claim 7 wherein the voltage on each electrode is adjusted to fine tune said position of said reflected light.

9. The micromechanical optical switch of claim 7 wherein said electrodes are triangular.

10. The micromechanical optical switch of claim 7 wherein said electrodes are rectangular.

11. A micromechanical optical switch, comprising:

a reflective surface having two angled reflective surfaces;

a micromechanical device, comprising;

a reflective member, supported by at least one hinge;

at least one post, supported said at least one hinge over an air gap; and

at least one electrode underneath said air gap, such that when said electrode is activated, said member deflects upon said hinge towards said electrode, but does not contact any surface; and

said micromechanical device positioned opposite said reflective surfaces such that light impinging upon a first of said angled reflective surfaces directs light to said reflective member of said micromechanical device and a second of said angled reflective surfaces receives light from said micromechanical device, wherein said second angled reflective surface receives light at a position dependent upon the deflection of said reflective member.

12. The micromechanical optical switch of claim 11 wherein said reflective member is supported by four hinges.

13. The micromechanical optical switch of claim 11 wherein said at least one electrode further comprises two electrodes.

14. The micromechanical optical switch of claim 13 wherein said electrodes are triangular.

15. The micromechanical optical switch of claim 13 wherein said electrodes are rectangular.

16. The micromechanical optical switch of claim 13 wherein voltage applied to each electrode is adjusted to fine tune said position of said reflected light.

17. The micromechanical optical switch of claim 11 wherein said at least one electrode further comprises four electrodes.

18. The micromechanical optical switch of claim 17 wherein voltage applied to each electrode is adjusted to fine tune said position of said reflected light.

19. The micromechanical optical switch of claim 17 wherein said electrodes are triangular.

20. The micromechanical optical switch of claim 17 wherein said electrodes are rectangular.