Planar electrode
First Claim
1. A planar electrode having a multiplicity of electrodes for measurement of electric activities of nerve cells in an organism, comprising an insulating substrate, a multiplicity of electrodes disposed thereon with a wiring section in which lead wires are installed from said electrodes, and an insulating layer covering said lead wires, said electrodes each having an area from 4×
- 102 μ
m2 to 4×
104 μ
m2, wherein impedance is in the range of 1Ω
to 100kΩ
when said electrodes are covered with an electrolytic solution and an alternating voltage of 1 kHz, 50 mV is provided to an optional portion between said electrolytic solution and said lead wires.
1 Assignment
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Accused Products
Abstract
A planar electrode which enables multi-point simultaneous stimulation and recording of nerve cells over a long time is provided, which also has excellent response property. An ITO film is evaporated on the whole surface of an insulating substrate of the hard glass, and the ITO film is etched so that the central portion of each electrode is located on each intersection of 8×8 lattices, the center-to-center distances of nearest electrodes of each electrode are equal, and a lead wire is stretched radially. Then, for an insulating layer, negative photo-sensitive polyimide is spin-coated, and an insulating layer pattern is exposure-formed so that a 50 μms square hole is produced at the center of each electrode. Furthermore, to the exposed portion of each electrode (that is, the inside of the 50 μms square), Ni is evaporated in a film thickness of 500 nm, which is followed by evaporating gold (50 nm) and platinum black (about 1 μm ). The contact with the external circuit of the section near the end opposite to the electrode of the lead wire was coated with gold and nickel.
189 Citations
13 Claims
-
1. A planar electrode having a multiplicity of electrodes for measurement of electric activities of nerve cells in an organism, comprising an insulating substrate, a multiplicity of electrodes disposed thereon with a wiring section in which lead wires are installed from said electrodes, and an insulating layer covering said lead wires, said electrodes each having an area from 4×
- 102 μ
m2 to 4×
104 μ
m2, wherein impedance is in the range of 1Ω
to 100kΩ
when said electrodes are covered with an electrolytic solution and an alternating voltage of 1 kHz, 50 mV is provided to an optional portion between said electrolytic solution and said lead wires. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
- 102 μ
Specification