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Plasma assisted chemical transport method and apparatus

  • US 5,811,021 A
  • Filed: 02/28/1995
  • Issued: 09/22/1998
  • Est. Priority Date: 02/28/1995
  • Status: Expired due to Term
First Claim
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1. A method for shaping the surface of a workpiece comprising the steps of:

  • providing a tool having a working head that has a working head footprint smaller than the area of said workpiece,mounting said working head for motion relative to said workpiece in proximity to and spaced from the surface of said workpiece,energizing said working head to shape a footprint area of the surface of said workpiece that is immediately proximate to said working head,moving said working head relative to said workpiece surface in substantially circular scan paths having a center at a scan center point on said workpiece, andshifting said scan path radially relative to said scan center point to cause said working head footprint to scan over areas of the surface of said workpiece in a plurality of substantially circular scan paths of different radii each having a center at said scan center point, wherein all said radii have finite values, whereby the center of said working head footprint is spaced from said scan center point in all of said scan paths.

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