Pressure sensor package and method of making the same
First Claim
1. A method of securing a pressure sensor diaphragm to a pressure sensor base comprising the steps of:
- positioning the pressure sensor diaphragm over the pressure sensor base;
placing a pressure sensor cap over the pressure sensor diaphragm;
applying a tensile force to at least a portion of the cap; and
deforming a portion of the cap around a portion of the base after said step of applying a tensile force to at least a portion of the cap.
1 Assignment
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Accused Products
Abstract
A method of securing a pressure sensor diaphragm to a pressure sensor base, including the steps of positioning the pressure sensor diaphragm over the pressure sensor base, placing a pressure sensor cap over the pressure sensor diaphragm, applying a tensile force to at least a portion of the cap, and deforming a portion of the cap around a portion of the base. The applying step can occur before the deforming step by engaging a portion of the cap and advancing the base toward the cap to create tension in a portion of the cap. This creates a tensile preload in the cap. The applying step can instead be performed during the deforming step by engaging a first portion of the cap and advancing a second portion of the cap toward the first portion of the cap and around a portion of the base. This can create tension in a portion of the cap when the deformation operation is being performed.
46 Citations
22 Claims
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1. A method of securing a pressure sensor diaphragm to a pressure sensor base comprising the steps of:
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positioning the pressure sensor diaphragm over the pressure sensor base; placing a pressure sensor cap over the pressure sensor diaphragm; applying a tensile force to at least a portion of the cap; and deforming a portion of the cap around a portion of the base after said step of applying a tensile force to at least a portion of the cap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of securing a pressure sensor diaphragm to a pressure sensor base, the method comprising:
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positioning the pressure sensor diaphragm over the pressure sensor base; placing a pressure sensor cap over the pressure sensor diaphragm; applying a tensile force to at least a portion of the cap; deforming a portion of the cap around a portion of the base; and removing said tensile force to allow elastic expansion of a portion of said cap. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification