Fluid pressure sensor with contaminant exclusion system
First Claim
1. In a fluid pressure sensor including a housing, a deflectable member disposed within said housing, fluid inlet means for admitting a fluid into said housing and for defining a fluid path to said deflectable member, means for detecting the deflection of said deflectable member in response to impingement of said fluid against said deflectable member, and means for generating signals representative of the pressure of said fluid on said deflectable member, a system for shielding said deflectable member from contaminants in said fluid, said system comprising:
- A. first contaminant collecting means near said fluid inlet means for collecting relatively large solid contaminants;
B. second contaminant collecting means between said fluid inlet means and said deflectable member for collecting solid contaminants of an intermediate size; and
C. third contaminant collecting means near said deflectable member for collecting relatively small solid contaminants, wherein said first contaminant collecting means comprises an annular channel surrounding, and in fluid communication with, said fluid inlet means.
5 Assignments
0 Petitions
Accused Products
Abstract
A variable capacitance fluid pressure sensor of the type which includes a deflectable member includes a contaminant exclusion system which protects the deflectable member from both solid and non-solid fluid-borne contaminants. A system of traps disposed between the fluid inlet to the sensor and the deflectable member prevents deposition of process vapors in the fluid on the deflectable member and collects a variety of sizes of fluid-borne solid contaminants remote from the deflectable member.
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Citations
19 Claims
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1. In a fluid pressure sensor including a housing, a deflectable member disposed within said housing, fluid inlet means for admitting a fluid into said housing and for defining a fluid path to said deflectable member, means for detecting the deflection of said deflectable member in response to impingement of said fluid against said deflectable member, and means for generating signals representative of the pressure of said fluid on said deflectable member, a system for shielding said deflectable member from contaminants in said fluid, said system comprising:
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A. first contaminant collecting means near said fluid inlet means for collecting relatively large solid contaminants; B. second contaminant collecting means between said fluid inlet means and said deflectable member for collecting solid contaminants of an intermediate size; and C. third contaminant collecting means near said deflectable member for collecting relatively small solid contaminants, wherein said first contaminant collecting means comprises an annular channel surrounding, and in fluid communication with, said fluid inlet means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. In a fluid pressure sensor including a housing, a deflectable member disposed within said housing, fluid inlet means for admitting a fluid into said housing and for defining a fluid path to said deflectable member, means for detecting the deflection of said deflectable member in response to impingement of said fluid against said deflectable member, and means for generating signals representative of the pressure of said fluid on said deflectable member, a system for shielding said deflectable member from contaminants in said fluid, said system comprising:
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A. first contaminant collecting means near said fluid inlet means for collecting relatively large solid contaminants; B. second contaminant collecting means between said fluid inlet means and said deflectable member for collecting solid contaminants of an intermediate size; and C. third contaminant collecting means near said deflectable member for collecting relatively small solid contaminants, wherein said third contaminant collecting means comprises means near said deflectable member for diverting relatively small solid contaminants away from said deflectable member. - View Dependent Claims (13, 14, 15, 16)
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17. In a fluid pressure sensor including a housing, a deflectable member disposed within said housing, fluid inlet means for admitting a fluid into said housing and for defining a fluid path to said deflectable member, means for detecting the deflection of said deflectable member in response to impingement of said fluid against said deflectable member, and means for generating signals representative of the pressure of said fluid on said deflectable member, a vapor deposition inducement system, comprising:
A. vapor deposition inducing means removably disposed within said fluid inlet means for inducing deposition of vapors in said fluid within said fluid inlet means and preventing deposition of said vapors on said deflectable member, wherein said vapor deposition inducing means comprises; A. one or more thermally conductive deposition matrices having respective deposition surfaces, wherein said deposition matrices include a plurality of apertures for passage of said fluid therethrough; B. means for determining the respective temperatures of said fluid, said fluid inlet, said deflectable member, and said deposition matrices and for generating signals representative of said respective temperatures; C. means associated with said deposition matrices for controlling the temperature thereof; and D. feedback means associated with said controller for comparing the respective temperatures of said fluid, said fluid inlet, said deflectable member and said deposition matrices and for providing a signal to said temperature controller for adjusting the temperature of said deposition matrices to a desired temperature which is less than the temperatures of said fluid and said deflectable member. - View Dependent Claims (18, 19)
Specification