Fluid pressure sensor with contaminant exclusion system

• US 5,811,685 A
• Filed: 12/11/1996
• Issued: 09/22/1998
• Est. Priority Date: 12/11/1996
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Grudzien, Christopher P. Jr.
• Primary Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/763,020
• Time in Patent Office: 650 Days
• Field of Search: 96/173, 96/207, 95/17, 95/288, 55/267, 210/335, 210/90, 210/456, 73/715-746
• US Class Current: 73/724
• CPC Class Codes: G01L 19/0636 using particle filters
• CPC Class Codes: G01L 19/0654 against moisture or humidity

Abstract

A variable capacitance fluid pressure sensor of the type which includes a deflectable member includes a contaminant exclusion system which protects the deflectable member from both solid and non-solid fluid-borne contaminants. A system of traps disposed between the fluid inlet to the sensor and the deflectable member prevents deposition of process vapors in the fluid on the deflectable member and collects a variety of sizes of fluid-borne solid contaminants remote from the deflectable member.

Claims

1. In a fluid pressure sensor including a housing, a deflectable member disposed within said housing, fluid inlet means for admitting a fluid into said housing and for defining a fluid path to said deflectable member, means for detecting the deflection of said deflectable member in response to impingement of said fluid against said deflectable member, and means for generating signals representative of the pressure of said fluid on said deflectable member, a system for shielding said deflectable member from contaminants in said fluid, said system comprising:

A. first contaminant collecting means near said fluid inlet means for collecting relatively large solid contaminants;

B. second contaminant collecting means between said fluid inlet means and said deflectable member for collecting solid contaminants of an intermediate size; and

C. third contaminant collecting means near said deflectable member for collecting relatively small solid contaminants, wherein said first contaminant collecting means comprises an annular channel surrounding, and in fluid communication with, said fluid inlet means.

2. The system of claim 1, wherein the maximum dimension of the entrance to said annular channel from said fluid inlet means is small relative to the diameter of said fluid inlet means.

3. The system of claim 2, wherein for a diameter of the fluid inlet means of approximately 10,000 micrometers, the height of said entrance to said annular channel from said fluid inlet means is between about 1000 and 2500 micrometers.

4. The system of claim 1, wherein said second contaminant collecting means comprises:

A. baffle means disposed in said fluid path between said fluid inlet means and said deflectable member; and

B. trap means surrounding, and in fluid communication with, said fluid inlet means.

5. The system of claim 4, wherein said baffle means includes a central baffle portion and a peripheral conductance portion, wherein the diameter of said central baffle portion is at least as great as the diameter of said fluid inlet means, wherein fluid impinging on said central baffle portion is prevented from impinging directly on said deflectable member.

6. The system of claim 5, wherein said peripheral conductance portion of said baffle means comprises a circumferential region including a plurality of radially spaced apertures therein.

7. The system of claim 6, wherein said apertures in said conductance portion of said baffle means have a radial dimension which is at least as great as the thickness of the central baffle portion.

8. The system of claim 7, wherein said radial dimension of said apertures is not greater than approximately 250 micrometers.

9. The system of claim 5, wherein said trap means is in direct fluid communication with said annular channel and said annular channel is in direct fluid communication with said fluid inlet means.

10. The system of claim 9, wherein said trap means is adapted for collecting solid contaminants having a size which is greater than the radial dimension of said apertures in said peripheral conductance portion of said baffle means.

11. The system of claim 10, wherein said solid contaminants collected within said trap means have a size between about 250 and 2500 micrometers.

12. In a fluid pressure sensor including a housing, a deflectable member disposed within said housing, fluid inlet means for admitting a fluid into said housing and for defining a fluid path to said deflectable member, means for detecting the deflection of said deflectable member in response to impingement of said fluid against said deflectable member, and means for generating signals representative of the pressure of said fluid on said deflectable member, a system for shielding said deflectable member from contaminants in said fluid, said system comprising:

A. first contaminant collecting means near said fluid inlet means for collecting relatively large solid contaminants;

B. second contaminant collecting means between said fluid inlet means and said deflectable member for collecting solid contaminants of an intermediate size; and

C. third contaminant collecting means near said deflectable member for collecting relatively small solid contaminants, wherein said third contaminant collecting means comprises means near said deflectable member for diverting relatively small solid contaminants away from said deflectable member.

13. The system of claim 12, wherein said means for diverting relatively small solid contaminants away from said deflectable member comprises means for defining a contour of said housing near the location at which said deflectable member is disposed within said housing, wherein said housing at said location near said deflectable member slopes away from said deflectable member.

14. The system of claim 13, wherein said housing at said location near said deflectable member is contoured such that the angle between said housing and said deflectable member is greater than 90 degrees.

15. The system of claim 14, wherein said angle is approximately 98 degrees.

16. The system of claim 13, wherein said relatively small solid contaminants have an average size of not greater than about 250 micrometers in diameter.

17. In a fluid pressure sensor including a housing, a deflectable member disposed within said housing, fluid inlet means for admitting a fluid into said housing and for defining a fluid path to said deflectable member, means for detecting the deflection of said deflectable member in response to impingement of said fluid against said deflectable member, and means for generating signals representative of the pressure of said fluid on said deflectable member, a vapor deposition inducement system, comprising:

A. vapor deposition inducing means removably disposed within said fluid inlet means for inducing deposition of vapors in said fluid within said fluid inlet means and preventing deposition of said vapors on said deflectable member, wherein said vapor deposition inducing means comprises;

A. one or more thermally conductive deposition matrices having respective deposition surfaces, wherein said deposition matrices include a plurality of apertures for passage of said fluid therethrough;

B. means for determining the respective temperatures of said fluid, said fluid inlet, said deflectable member, and said deposition matrices and for generating signals representative of said respective temperatures;

C. means associated with said deposition matrices for controlling the temperature thereof; and

D. feedback means associated with said controller for comparing the respective temperatures of said fluid, said fluid inlet, said deflectable member and said deposition matrices and for providing a signal to said temperature controller for adjusting the temperature of said deposition matrices to a desired temperature which is less than the temperatures of said fluid and said deflectable member.

18. The system of claim 17, wherein the temperature of said deposition surfaces is sufficiently low, relative to the temperature of said fluid and said deflectable member, to induce deposition of said vapors onto said deposition surfaces instead of on said deflectable member.

19. The system of claim 17, further comprising a system for shielding said deflectable member from solid contaminants in said fluid, said system including:

A. first contaminant collecting means near said fluid inlet means for collecting relatively large solid contaminants;

B. second contaminant collecting means between said fluid inlet means and said deflectable member for collecting solid contaminants of an intermediate size; and

C. third contaminant collecting means near said deflectable member for collecting relatively small solid contaminants.