Three variable optimization system for thin film coating design
First Claim
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1. A method of operating a computer to design an anti-reflective coating that is optimized for a given wavelength, wherein the anti-reflective coating comprises one or more layers, the method comprising the acts of:
- accepting as input a layer count value, wherein the layer count value is the number of layers that will make up the anti-reflective coating;
finding, for each of the layers, three optimized values that will cause the reflectance properties of a substrate coated with the anti-reflective coating to be non-reflective for the given wavelength, wherein the three optimized values for each layer comprise an optimized absorption coefficient, an optimized index of refraction, and an optimized thickness, and wherein the three optimized values for at least one layer are all greater than zero; and
determining, for each of the layers, what proportion of two or more available thin film materials will result in a mixture that will match the three optimized values.
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Abstract
A method and system for designing and manufacturing a high-performance, optimized optical interference coatings that have a minimal number of layers. Index of refraction, absorption coefficient, and thickness values are selected for each of the layers in the design so as to cause the reflectance of a coated object to be zero for a given wavelength. Materials that with the selected properties are manufactured by mixing two or more preexisting available materials.
79 Citations
13 Claims
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1. A method of operating a computer to design an anti-reflective coating that is optimized for a given wavelength, wherein the anti-reflective coating comprises one or more layers, the method comprising the acts of:
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accepting as input a layer count value, wherein the layer count value is the number of layers that will make up the anti-reflective coating; finding, for each of the layers, three optimized values that will cause the reflectance properties of a substrate coated with the anti-reflective coating to be non-reflective for the given wavelength, wherein the three optimized values for each layer comprise an optimized absorption coefficient, an optimized index of refraction, and an optimized thickness, and wherein the three optimized values for at least one layer are all greater than zero; and determining, for each of the layers, what proportion of two or more available thin film materials will result in a mixture that will match the three optimized values. - View Dependent Claims (2, 3, 4, 5)
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6. A system for designing an anti-reflective coating that is optimized for a given wavelength, wherein the anti-reflective coating comprises one or more layers, the system comprising:
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(a) a computer; and (b) a data storage medium that is accessible by the computer, wherein the data storage medium has a program stored on it that is capable of being executed by the computer, and that is configured to cause the computer to; accept as input a layer count value, wherein the layer count value is the number of layers that will make up the anti-reflective coating, find, for each of the layers, three optimized values that will cause the reflectance properties of a substrate coated with the anti-reflective coating to be non-reflective for the given wavelength, wherein the three optimized values for each layer comprise an optimized absorption coefficient, an optimized index of refraction, and an optimized thickness, and wherein the three optimized values for at least one layer are all greater than zero, and determine, for each of the layers, what proportion of two or more available thin film materials will result in a mixture that will match the three optimized values. - View Dependent Claims (7, 8, 9, 10)
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11. A system for designing an anti-reflective coating that is optimized for a given wavelength, wherein the anti-reflective coating comprises one or more layers, the system comprising:
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means for accepting as input a layer count value, wherein the layer count value is the number of layers that will make up the anti-reflective coating; means for finding, for each of the layers, three optimized values that will cause the reflectance of a substrate coated with the anti-reflective coating to be substantially zero for the given wavelength, wherein the three optimized values for each layer comprise an optimized absorption coefficient, an optimized index of refraction, and an optimized thickness, and wherein the three optimized values for at least one layer are all greater than zero; and means for determining, for each of the layers, what proportion of two or more available thin film materials will result in a mixture that will match the three optimized values. - View Dependent Claims (12)
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13. A method of operating a computer to design an anti-reflective coating, wherein the anti-reflective coating comprises one or more layers, the method comprising the acts of:
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accepting as input a layer count value, wherein the layer count value is the number of layers that will make up the anti-reflective coating; finding, for each of the layers, three optimized values that will cause the reflectance properties of a substrate coated with the anti-reflective coating to be non-reflective, wherein the three optimized values for each layer comprise an optimized absorption coefficient, an optimized index of refraction, and an optimized thickness, and wherein the three optimized values for at least one layer are all greater than zero; and determining, for each of the layers, what proportion of two or more available thin film materials will result in a combination that will match the three optimized values.
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Specification