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Three variable optimization system for thin film coating design

  • US 5,812,405 A
  • Filed: 05/23/1995
  • Issued: 09/22/1998
  • Est. Priority Date: 05/23/1995
  • Status: Expired due to Fees
First Claim
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1. A method of operating a computer to design an anti-reflective coating that is optimized for a given wavelength, wherein the anti-reflective coating comprises one or more layers, the method comprising the acts of:

  • accepting as input a layer count value, wherein the layer count value is the number of layers that will make up the anti-reflective coating;

    finding, for each of the layers, three optimized values that will cause the reflectance properties of a substrate coated with the anti-reflective coating to be non-reflective for the given wavelength, wherein the three optimized values for each layer comprise an optimized absorption coefficient, an optimized index of refraction, and an optimized thickness, and wherein the three optimized values for at least one layer are all greater than zero; and

    determining, for each of the layers, what proportion of two or more available thin film materials will result in a mixture that will match the three optimized values.

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