Articulated arm transfer device
First Claim
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1. A transport apparatus having a movable arm assembly operably connected to a drive mechanism, the drive mechanism comprising:
- a housing having a chamber;
electromagnetic stators stationarily connected to the housing at different heights relative to the chamber, the stators being located outside of the chamber;
a drive shaft assembly located, at least partially, in the chamber, the assembly including two independently rotatable coaxial shafts, a first one of the shafts extending coaxially through a second one of the shafts, one of the shafts having a set of permanent magnets that are aligned with a first one of the electromagnetic stators; and
a first brake system having two disks separately connected respectively to the two coaxial shafts, wherein a first one of the disks is located at a second one of the electromagnetic stators and, when the second electromagnetic stator is energized, the first disk is magnetically moved into contact with a second one of the disks to lock the two coaxial shafts to each other.
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Abstract
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber.
72 Citations
16 Claims
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1. A transport apparatus having a movable arm assembly operably connected to a drive mechanism, the drive mechanism comprising:
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a housing having a chamber; electromagnetic stators stationarily connected to the housing at different heights relative to the chamber, the stators being located outside of the chamber; a drive shaft assembly located, at least partially, in the chamber, the assembly including two independently rotatable coaxial shafts, a first one of the shafts extending coaxially through a second one of the shafts, one of the shafts having a set of permanent magnets that are aligned with a first one of the electromagnetic stators; and a first brake system having two disks separately connected respectively to the two coaxial shafts, wherein a first one of the disks is located at a second one of the electromagnetic stators and, when the second electromagnetic stator is energized, the first disk is magnetically moved into contact with a second one of the disks to lock the two coaxial shafts to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A transport apparatus having a movable arm assembly operably connected to a drive mechanism, the drive mechanism comprising:
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a housing having a chamber; a drive shaft assembly located, at least partially, in the chamber, the assembly including two independently rotatable coaxial shafts, a first one of the shafts extending coaxially through a second one of the shafts; a drive system for moving at least one of the shafts relative to the housing, the drive system including a first electromagnetic coil stationarily connected to the housing; a brake system having two disks, a first one of the disks being connected to the housing and a second one of the disks being connected to one of the coaxial shafts; and a second electromagnetic coil connected to the housing spaced from the first electromagnetic coil; wherein the two disks are located at the second electromagnetic coil and, when the second electromagnetic coil is energized, the two disks are moved into contact with each other to thereby prevent rotation of the second shaft relative to the housing. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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Specification