Phase-contrast electron microscope and phase plate therefor

• US 5,814,815 A
• Filed: 12/17/1996
• Issued: 09/29/1998
• Est. Priority Date: 12/27/1995
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Matsumoto, Takao, Tonomura, Akira, Osakabe, Nobuyuki
• Primary Examiner(s): Berman, Jack I.
• Application Number:
  US08/768,355
• Time in Patent Office: 651 Days
• Field of Search: 250/311
• US Class Current: 250/311
• CPC Class Codes: H01J 2237/1514 Prisms
• CPC Class Codes: H01J 2237/226 Image reconstruction
• CPC Class Codes: H01J 2237/2614 Holography or phase contrast, phase related imaging in general, e.g. phase plates
• CPC Class Codes: H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes
• CPC Class Codes: H01J 37/263 Contrast, resolution or power of penetration

Abstract

An electrostatic potential in a vacuum in the vicinity of a focused electron beam of a direct wave formed on an optical axis of a back focal plane of an objective lens used in an electron microscope can be externally controlled. Therefore, the electrostatic potential is controlled by supplying an electric potential to a ring-shaped electrode from the outside. The outer sides of the electrode are interposed between both of insulators and conductors so as to shield the electrostatic potential against the outer side of a ring, whereby a phase shift is supplied only to an electron beam that passes through the inside of the ring. A phase-contrast electron microscope can be realized which includes a phase plate corresponding to an electron beam, which is capable of observing a phase object with contrast.

Claims

1. A phase plate disposed in a substantially optical-axis position in the vicinity of a back focal plane of an objective lens of an electron microscope and shaped in ring form, comprising:

a ring-shaped microelectrode covered with conductors adapted so as to expose a ring inner surface through which electrons corresponding to a focused electron beam of a direct wave formed in said substantially optical-axis position pass and to interpose said microelectrode between said conductors with insulators interposed therebetween; and

a conductor for introducing an external potential into said microelectrode.

2. A phase plate as claimed in claim 1, wherein a plurality of rings different in inside diameter from each other are linked together.

3. A phase plate disposed in a substantially optical-axis position in the vicinity of a back focal plane of an objective lens of an electron microscope, comprising:

a thin-wire shaped electrode covered with conductors adapted to expose portions lying in a region through which electrons corresponding to a focused electron beam of a direct wave lying in said substantially optical-axis position and to wrap said electrode therein with insulators interposed therebetween.

4. A phase-contrast electron microscope having a phase plate disposed in the vicinity of a focused electron beam of a direct wave formed on an optical axis adjacent to a back focal plane of an objective lens, said phase plate comprising a microelectrode covered with conductors adapted so as to expose portions through which electrons corresponding to the focused electron beam of the direct wave pass and to interpose said microelectrode between said conductors with insulators interposed therebetween, and a conductor for introducing an external potential into said microelectrode, said phase-contrast electron microscope comprising:

an electric source for supplying the external potential to said microelectrode, and

said conductors interposing said electrode therebetween being grounded.

5. A phase-contrast electron microscope having a phase plate disposed in the vicinity of a focused electron beam of a direct wave formed on an optical axis adjacent to a back focal plane of an objective lens, said phase plate comprising a ring-shaped microelectrode covered with conductors adapted so as to expose a ring inner surface through which electrons corresponding to the focused electron beam of the direct wave pass and to interpose said microelectrode between said conductors with insulators interposed therebetween, and a conductor for introducing an external potential into said microelectrode, said phase-contrast electron microscope comprising:

an electric source for supplying the external potential to said microelectrode, and

said conductors interposing said microelectrode therebetween being grounded.

6. A phase-contrast electron microscope as claimed in claim 5, wherein said phase plate includes a plurality of linked rings different in inside diameter from each other and a transfer mechanism for selecting one of said rings of said phase plate.

7. A phase-contrast electron microscope having a phase plate disposed in the vicinity of a focused electron beam of a direct wave formed on an optical axis near a back focal plane of an objective lens and a biprism provided behind said phase plate, said phase plate comprising an electrode covered with conductors adapted so as to expose portions in a region through which electrons corresponding to the focused electron beam of the direct wave pass and to wrap said electrode therein with insulators interposed between said conductors, said phase-contrast electron microscope comprising:

an electric source for supplying an external potential to said electrode,

said conductors interposing said electrode therebetween being grounded, and

said biprism being used to evaluate the effects of said phase plate prior to the observation of a specimen.

8. A phase-contrast electron microscope as claimed in claim 7, wherein a phase plate is used which comprises a ring-shaped microelectrode covered with conductors adapted so as to expose a ring inner surface through which electrons corresponding to a focused electron beam of a direct wave lying in a substantially optical-axis position near the back focal plane and to interpose said microelectrode between said conductors with insulators interposed therebetween, and a conductor for introducing an external potential into said microelectrode.

9. A phase-contrast electron microscope as claimed in claim 8, wherein said phase plate includes a plurality of linked rings different in inside diameter from each other.

10. A phase-contrast electron microscope as claimed in claim 7, wherein a phase plate is used which comprises a thin-wire shaped microelectrode covered with conductors adapted so as to expose a ring inner surface through which electrons corresponding to a focused electron beam of a direct wave lying in a substantially optical-axis position near the back focal plane pass and to interpose said microelectrode between said conductors with insulators interposed therebetween, and a conductor for introducing an external potential into said microelectrode.

11. A phase-contrast electron microscope having a phase plate disposed in the vicinity of a focused electron beam of a direct wave formed on an optical axis near a back focal plane of an objective lens and a biprism provided behind said phase plate, said phase plate comprising an electrode covered with conductors adapted so as to expose portions in a region through which electrons corresponding to the focused electron beam of the direct wave pass and to wrap said electrode therein with insulators interposed between said conductors, said phase-contrast electron microscope comprising:

an electric source for supplying an external potential to said electrode,

said conductors interposing said electrode therebetween being grounded,

said biprism being used to evaluate the effects of said phase plate prior to the observation of a specimen, said evaluation being carried out based on a change in image at the time that an electric potential for supplying a diffraction image focused onto an observing surface to said biprism is changed.