Pressure type flow rate control apparatus

• US 5,816,285 A
• Filed: 08/11/1997
• Issued: 10/06/1998
• Est. Priority Date: 08/12/1996
• Status: Expired due to Term

• Current Assignee: Fujikin Incorporated, Tadahiro Ohmi, Tokyo Electron Limited
• Original Assignee: Fujikin Incorporated, Tadahiro Ohmi
• Inventors: Ohmi, Tadahiro, Morimoto, Akihiro, Ikeda, Nobukazu, Fukuda, Hiroyuki, Nishino, Koji, Minami, Yukio, Kawada, Koji, Dohi, Ryosuke
• Primary Examiner(s): Bennett, Henry A.
• Assistant Examiner(s): Kim, Joanne Y.
• Application Number:
  US08/907,951
• Time in Patent Office: 421 Days
• Field of Search: 137/487.5, 137/486, 137/14, 138/44
• US Class Current: 137/487.5
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than about 0.7. The apparatus comprises: a plate for forming the orifice (5); a control valve (2) positioned upstream of the orifice; an orifice corresponding valve (9) positioned downstream of the orifice (5); a primary pressure detector (3) positioned between the control valve (2) and the orifice (5); a secondary pressure detector (11) positioned downstream of the orifice (5); a calculation control device (6) for calculating flow rate Qc on the basis of the measured pressure P1 of the primary pressure detector (3) by a formula Qc=KP1 (K being a constant) and for outputting as a control signal Qy a difference between a flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit (14) of the control valve 2; and a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11). The pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.

Claims

1. A pressure type flow control apparatus for controlling flow rate of a fluid in a state where a ratio of P2 /P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at about 0.7 or less, comprising:

a means for forming the orifice (5);

a control valve (2) positioned upstream of the orifice and a drive unit (14) for regulating the control valve;

an orifice corresponding valve (9) positioned downstream of the orifice (5);

a primary pressure detector (3) positioned between the control valve (2) and the orifice(5);

a secondary pressure detector (11) positioned downstream of the orifice (5);

a calculation control device for calculating flow rate Qc on the basis of a detected pressure P1 of the primary pressure detector (3) by a formula Qc=KP1 (K being constant), and for outputting, as a control signal Qy, a difference between a flow rate command signal Qs and the calculated flow rate signal Qc, to the drive unit (14) of the control valve (2); and

,

a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and a detected pressure P2 of the secondary pressure detector (11);

wherein the pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.

2. A pressure flow rate control apparatus as claimed in claim 1 wherein the pressure comparing, calculating apparatus (10) includes a means for dispatching a warning signal if the ration of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11) exceeds about 0.7 and the pressure type flow rate control apparatus is constructed such that at least a respective one of the control valve (2) and the orifice corresponding valve (9) is changed over, by the warning signal, to be controlled manually or by a different system.

3. A pressure type flow rate control apparatus as claimed in claim 1 wherein the pressure comparing, calculating apparatus (10) includes a means for dispatching a warning/valve-closing signal, to at least one of the control valve (2) and the orifice corresponding valve (9) if the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11) is about 1.0.

4. A pressure type flow rate control apparatus as claimed in claim 1 wherein the orifice (5) has a vertical sectional shape which is similar to that of an open mouth of a bugle and the orifice (5) has a portion with a maximum diameter facing an upstream side, a portion with a minimum diameter located at a middle, and a portion with a medium diameter facing a downstream side.

5. A pressure type flow rate control apparatus as claimed in claim 1 wherein the means for forming the orifice can be exchanged with another means for forming an orifice.

6. A pressure type flow rate control apparatus as claimed in claim 1 wherein a valve main body (12) of the control valve (5) and a valve main body (9a) of the orifice corresponding valve (9) are formed as one piece and constructed in a block shape defining a mounting hole for mounting the primary pressure detector, a mounting hole for mounting the secondary pressure detector and a mounting hole for mounting the means for forming the orifice.