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Capacitive in-plane accelerometer

  • US 5,817,942 A
  • Filed: 02/28/1996
  • Issued: 10/06/1998
  • Est. Priority Date: 02/28/1996
  • Status: Expired due to Term
First Claim
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1. A micromechanical sensor comprising:

  • a proof mass suspended over a substrate by a plurality of flexures; and

    at least one stop mechanism disposed adjacent to a respective one of said plurality of flexures for preventing said flexure from deflecting more than a predetermined amount, said stop mechanism disposed such that said flexures communicate with said stop mechanism as a result of linear movement of said proof mass in a direction substantially perpendicular to said stop mechanism.

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