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Rotatable micromachined device for sensing magnetic fields

  • US 5,818,227 A
  • Filed: 02/22/1996
  • Issued: 10/06/1998
  • Est. Priority Date: 02/22/1996
  • Status: Expired due to Term
First Claim
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1. A micromachined electromechanical device comprising:

  • a structure suspended above a substrate, rotatable about a first axis, and having at least one rotatable structure finger;

    at least one flexible suspension arm, each suspension arm having a first end connected to the substrate and a second end connected to the rotatable structure;

    at least one first fixed finger connected to the substrate, each first fixed finger being adjacent to a first side of one of the rotatable structure fingers;

    at least one second fixed finger connected to the substrate, each second fixed finger being adjacent to a second side of one of the rotatable structure fingers; and

    a ferromagnetic material having a magnetic moment along a second axis, perpendicular to the first axis, and connected to the rotatable structure, so that the rotatable structure is rotatable in response to a magnetic field having a component perpendicular to the first axis and perpendicular to the second axis.

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