Vertical transfer system for a vacuum chamber and gate valve assembly

• US 5,820,104 A
• Filed: 01/25/1996
• Issued: 10/13/1998
• Est. Priority Date: 01/27/1995
• Status: Expired due to Fees

• Current Assignee: Seiko Instruments Incorporated (Seiko Group)
• Original Assignee: Seiko Seiki Kabushiki Kaisha
• Inventors: Matsuzaki, Ryuichi, Koyano, Shinji
• Primary Examiner(s): LEE, KEVIN L
• Application Number:
  US08/591,693
• Time in Patent Office: 992 Days
• Field of Search: 251/65, 251/129.2, 251/129.15, 251/129.09, 251/129.1, 251/326, 310/12, 310/15
• US Class Current: 251/326
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

A vacuum-oriented vertical transfer system which provides super vacuum/super clean environments, and a gate valve assembly which reduces the size of electromagnet sections. The vacuum-oriented vertical transfer system includes a cylindrical partition wall, and a rod vertically moved through an open bottom of a vacuum container. The rod is floatingly supported in radial and axial directions thereof by a radial magnetic support device and an axial magnetic support device, respectively. The gate valve assembly comprises a closure member mounted for positioning adjacent to and away from a port of a container to close and open the port, respectively. A neck member is integrally connected to the closure member and is mounted for movement to position the closure member to open and close the port of the container. A radial magnet device levitates the neck member by magnetic forces in a radial direction thereof. An axial magnetic device levitates the neck member by magnetic forces in an axial direction thereof. A moving mechanism moves the neck member to position the closure member to open and close the port of the container.

Claims

1. A vacuum-oriented vertical transfer system comprising:

a cylindrical partition wall provided externally of a vacuum container, the cylindrical partition wall having a first end open to an open bottom of the vacuum container and a second closed end;

a rod capable of vertical movement through the open bottom of the vacuum container, the rod having a front end located within the vacuum container and a rear end located within the partition wall;

radial magnetic support means for applying a magnetic force from outside of the partition wall to floatingly support the rod in a radial direction;

axial magnetic support means for applying a magnetic force from outside of the partition wall to floatingly support the rod in an axial direction; and

vertical transfer means for vertically moving the radial magnetic support means along the partition wall.

2. A vacuum-oriented vertical transfer system according to claim 1, wherein the radial magnetic support means comprises a magnetic target integrally mounted to an outer peripheral surface of the rod, and radial electromagnets arranged adjacent to the outer peripheral surface of the partition wall and adapted to attract the magnetic target;

wherein the axial magnetic support means comprises inner permanent magnets integrally mounted to the outer peripheral surface of the rod, and outer permanent magnets arranged adjacent to the outer peripheral surface of the partition wall and adapted to produce a repulsive force relative to the inner permanent magnets; and

wherein the vertical transfer means comprises a transfer body and a transfer mechanism for vertically moving the transfer body along the partition wall, and wherein the radial electromagnets and the outer permanent magnets are integrally mounted to the transfer body.

3. A vacuum-oriented vertical transfer system according to claim 1;

wherein the radial magnetic support means and the vertical transfer means comprise a linear pulse motor body arranged adjacent to the outer peripheral surface of the partition wall, and a comb-like magnetic target integrally attached to the outer peripheral surface of the rod in face-to-face relation to the linear pulse motor body.

4. A gate valve assembly comprising:

a closure member arranged to face with a port of a container;

a neck integrally formed on one side of the closure member;

radial magnetic support means for floatingly supporting the neck in a radial direction under a magnetic force;

inner permanent magnets integrally connected to the neck;

outer permanent magnets for floatingly supporting the neck in an axial direction under a repulsive force generated between the outer permanent magnets and the inner permanent magnets; and

swing means for swinging the neck back and forth toward the port of the container, whereby the port is opened and closed by the closure member.

5. A gate valve assembly according to claim 4;

wherein the swing means comprises a rotary mechanism for rotating the radial magnetic support means and the outer permanent magnets.

6. A gate valve assembly according to claim 4;

wherein the radial magnetic support means comprises a first radial electromagnet section and a second radial electromagnet section arranged along the axis of the neck; and

wherein the swing means comprises a swing controller for controlling an exciting current to at least one of the first and the second radial electromagnet sections so as to change a radial floating position of the neck.

7. A gate valve assembly according to claim 4;

wherein the closure member is comprised of a magnetic material; and

further comprising a resilient seal member disposed between the port of the container and the closure member, and a sealing electromagnet for attracting the closure member toward the port of the container.

9. A gate valve assembly according to claim 4;

wherein the radial magnetic support means comprises a magnetic target integrally connected to the neck; and

an electromagnet section disposed opposite to and spaced from the magnetic target.

8. A gate valve assembly comprising:

a cylindrical seal block having an inclined front end and a rear end connected to a port of a container;

a closure member located adjacent to the seal block and having an inclined portion arranged in face-to-face relation to the inclined front end of the seal block;

a resilient seal member disposed between the inclined portion of the closure member and the inclined front end of the seal block;

a neck mounted to a lower end of the closure member;

a radial electromagnet section for floatingly supporting the neck in a radial direction under a magnetic force;

inner permanent magnets integrally mounted to the neck;

outer permanent magnets for floatingly supporting the neck in an axial direction under a repulsive force generated between the outer permanent magnets and the inner permanent magnets; and

a sealing electromagnet for axially attracting the neck, whereby the inclined portion of the closure member is brought into close contact with the inclined front end of the seal block.

10. A transfer system comprising:

an enclosure having a closed end and an open end for connection to an open end of a vacuum container to provide a vacuum environment within the enclosure;

a transfer member extending into the enclosure for movement through the open end of the enclosure and the open end of the vacuum container in an axial direction of the transfer member;

radial magnetic means for floatingly supporting the transfer member by magnetic forces in a radial direction thereof;

axial magnetic means for floatingly supporting the transfer member by magnetic forces in the axial direction; and

transfer means for moving the radial magnetic means and the axial magnetic means in the axial direction.

11. A transfer system according to claim 10;

wherein the radial magnetic means comprises a magnetic target integrally connected to an outer peripheral surface of the transfer member, and at least one radial electromagnet disposed adjacent to and spaced from an outer peripheral surface of the enclosure for magnetically attracting the magnetic target.

12. A transfer system according to claim 11;

wherein the axial magnetic means comprises at least one first electromagnet integrally connected to the outer peripheral surface of the transfer member, and at least one second electromagnet disposed adjacent to and spaced from the outer peripheral surface of the enclosure for producing a magnetic repulsive force with the first electromagnet.

13. A transfer system according to claim 12;

wherein the transfer means comprises a transfer body and a transfer mechanism for moving the transfer body in the axial direction, the radial electromagnet and the second electromagnet being integrally connected to the transfer body.

14. A transfer system according to claim 10;

wherein the radial magnetic means and the transfer means comprise a linear pulse motor.

15. A transfer system according to claim 14;

wherein the linear pulse motor comprises a linear pulse motor body disposed adjacent to and spaced from an outer peripheral surface of the container, and a magnetic target having a comb-shaped outer peripheral surface and being integrally connected to an outer peripheral surface of the transfer member opposite to the linear pulse motor body.

16. A gate valve assembly comprising:

a closure member mounted for positioning adjacent to and away from a port of a container to close and open the port, respectively;

a neck member integrally connected to the closure member and mounted for movement to position the closure member to open and close the port of the container;

radial magnetic means for floatingly supporting the neck member by magnetic forces in a radial direction thereof;

axial magnetic means for floatingly supporting the neck member by magnetic forces in an axial direction thereof; and

moving means for moving the neck member to position the closure member to open and close the port of the container.

17. A gate valve assembly according to claim 16;

wherein the moving means comprises a rotary mechanism for rotating the radial magnetic means and the axial magnetic means.

18. A gate valve assembly according to claim 16;

wherein the radial magnetic means comprises two radial electromagnet sections disposed along the axial direction of and spaced from the neck member; and

wherein the moving means comprises a controlling device for controlling an exciting current supplied to at least one of the radial electromagnet sections to change a radial floating position of the neck member.

19. A gate valve assembly according to claim 16;

wherein the closure member is comprised of a magnetic material.

20. A gate valve assembly according to claim 19;

further comprising a seal member connected to the closure member for providing a seal between the closure member and the port of the container when the closure member closes the port.

21. A gate valve assembly according to claim 20;

further comprising an electromagnet for magnetically attracting the closure member toward the port of the container to close the port.

22. A gate valve assembly comprising:

a block member having a first open end for connection to a port of a container, and a second open end;

a closure member for positioning adjacent to and away from the second open end of the block member to close and open the port of the container, respectively;

a neck member integrally connected to the closure member;

radial magnetic means for floatingly supporting the neck member by magnetic forces in a radial direction thereof;

axial magnetic means for floatingly supporting the neck member by magnetic forces in an axial direction thereof; and

electromagnetic means for moving the neck member by magnetic forces in the axial direction to bring the closure member adjacent to the second open end of the block member to close the port of the container.

23. A gate valve assembly according to claim 22;

wherein the second open end of the block member has an inclined peripheral surface; and

wherein the closure member has an inclined surface for mating engagement with the inclined peripheral surface of the block member to close the port of the container.