System for providing in-situ temperature monitoring and temperature control of a specimen being exposed to plasma environments
First Claim
1. A housing for providing temperature monitoring and temperature control of a specimen, while the specimen is being exposed to plasma environments for in-situ reactivity studies or other plasma processing purposes, said housing being adaptable for use with a temperature controller and a pressure measurement device, said housing comprising:
- a) temperature monitoring means for providing in-situ specimen temperature indications, said temperature monitoring means comprising;
i) a first enclosure having a specimen supporting portion on an exterior surface thereof;
ii) a fluid conduit having a first end in fluid communication with an interior portion of said first enclosure; and
iii) a second enclosure having an interior portion thereof in fluid communication with a second end of said fluid conduit, said second enclosure including means for attachment to a pressure measurement device;
wherein temperature indications of a test specimen positioned on said specimen supporting portion are correlated with pressures in said first and second enclosures based upon mathematical relationships therebetween, said correlations providing commensurate indications of pressure to said pressure measurement device to provide said in-situ specimen temperature indications; and
b) temperature control connection means for providing connection to a temperature controller for providing a desired temperature of said specimen supporting portion.
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Accused Products
Abstract
A housing provides temperature monitoring and temperature control of a specimen, while the specimen is being exposed to plasma environments for in-situ reactivity studies or other plasma processing purposes. The housing is adaptable for use with a temperature controller and a pressure measurement device. The housing includes a temperature monitoring mechanism and temperature control connections. The temperature monitoring mechanism provides in-situ specimen temperature indications. It includes a first enclosure having a specimen supporting portion on an exterior surface thereof. A fluid conduit has a first end in fluid communication with an interior portion of the first closure. A second enclosure has an interior portion thereof in fluid communication with a second end of the fluid conduit. The second enclosure includes the ability for attachment to a pressure measurement device. Temperature indications of a test specimen positioned on the specimen supporting portion are correlated with pressures in the first and second enclosures. The correlations provide commensurate indications of pressure to the pressure measurement device to provide the in-situ specimen temperature indications. The temperature control connections allow use with a temperature controller for providing a desired temperature of the specimen supporting portion.
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Citations
16 Claims
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1. A housing for providing temperature monitoring and temperature control of a specimen, while the specimen is being exposed to plasma environments for in-situ reactivity studies or other plasma processing purposes, said housing being adaptable for use with a temperature controller and a pressure measurement device, said housing comprising:
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a) temperature monitoring means for providing in-situ specimen temperature indications, said temperature monitoring means comprising; i) a first enclosure having a specimen supporting portion on an exterior surface thereof; ii) a fluid conduit having a first end in fluid communication with an interior portion of said first enclosure; and iii) a second enclosure having an interior portion thereof in fluid communication with a second end of said fluid conduit, said second enclosure including means for attachment to a pressure measurement device; wherein temperature indications of a test specimen positioned on said specimen supporting portion are correlated with pressures in said first and second enclosures based upon mathematical relationships therebetween, said correlations providing commensurate indications of pressure to said pressure measurement device to provide said in-situ specimen temperature indications; and b) temperature control connection means for providing connection to a temperature controller for providing a desired temperature of said specimen supporting portion. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A system for providing temperature monitoring and temperature control of a specimen, while the specimen is being exposed to plasma environments for in-situ reactivity studies or other plasma processing purposes, comprising:
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a) a housing, comprising; i) temperature monitoring means for providing in-situ specimen temperature indications, said temperature monitoring means comprising; a first enclosure having a specimen supporting portion on an exterior surface thereof; a fluid conduit having a first end in fluid communication with an interior portion of said first enclosure; and a second enclosure having an interior portion thereof in fluid communication with a second end of said fluid conduit, said second enclosure including means for attachment to a pressure measurement device; wherein temperature indications of a test specimen positioned on said specimen supporting portion are correlated with pressures in said first and second enclosures based upon mathematical relationships therebetween, said correlations providing commensurate indications of pressure to said pressure measurement device to provide said in-situ specimen temperature indications; and ii) temperature control connection means for providing connection to a temperature controller for providing a desired temperature of said specimen supporting portion; b) a pressure measurement device attached to said second enclosure; and c) a temperature controller attached to said temperature control connection means. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification