Miniaturized filter assembly
First Claim
1. A high frequency microelectronic filter assembly comprising:
- a. at least one microresonator comprising at least two openings and at least one metal-lined resonance chamber micromachined in a layer of dielectric material;
b. input means for transmitting an electromagnetic input signal to said resonance chamber through a first one of said openings;
c. output means for receiving an electromagnetic output signal from said resonance chamber through a second one of said openings;
d. a first region of dielectric material arranged between said input means and said resonance chamber, for support of said input means and to maintain said resonance chamber and said input means separated from one another; and
e. a second region of dielectric material arranged between said output means and said resonance chamber, for support of said output means and to maintain said resonance chamber and said output means separated from one another.
1 Assignment
0 Petitions
Accused Products
Abstract
A high frequency micromachined filter assembly comprises at least one microresonator having at least one metal-lined resonance chamber and at least two openings. Input means couples an electromagnetic input signal to the resonance chamber through a first one of the openings. The output signal is coupled to output means from the resonance chamber through a second one of the openings. Dielectric material is arranged between the input means and the resonance chamber to maintain the resonator and the input means separated from one another. Dielectric material is arranged between the output means and the resonance chamber to maintain the resonator and the output means separated from one another.
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Citations
27 Claims
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1. A high frequency microelectronic filter assembly comprising:
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a. at least one microresonator comprising at least two openings and at least one metal-lined resonance chamber micromachined in a layer of dielectric material; b. input means for transmitting an electromagnetic input signal to said resonance chamber through a first one of said openings; c. output means for receiving an electromagnetic output signal from said resonance chamber through a second one of said openings; d. a first region of dielectric material arranged between said input means and said resonance chamber, for support of said input means and to maintain said resonance chamber and said input means separated from one another; and e. a second region of dielectric material arranged between said output means and said resonance chamber, for support of said output means and to maintain said resonance chamber and said output means separated from one another. - View Dependent Claims (2, 3, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 25)
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4. A high frequency microelectronic filter assembly comprising:
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a. at least one microresonator comprising at least two openings and at least one metal-lined resonance chamber micromachined in a layer of dielectric material; b. input means for transmitting an electromagnetic input signal to said resonance chamber through a first one of said openings; c. output means for receiving an electromagnetic output signal from said resonance chamber through a second one of said openings; d. a first region of dielectric material arranged between said input means and said resonance chamber, for support of said input means and to maintain said resonance chamber and said input means separated from one another; and e. a second region of dielectric material arranged between said output means and said resonance chamber for support of said output means and to maintain said resonance chamber and said output means separated from one another; and where said at leaset one microresonator comprises two microresonators, said input means is arranged between said microresonators, and said respective output means are arranged on opposite outer surfaces of said assembly. - View Dependent Claims (5, 6, 26, 27)
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20. A high frequency filter assembly comprising:
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a. at least one microresonator having at least one metal-lined resonance chamber and at least two openings, said chamber comprising a metal-lined, micromachined cavity formed in a layer of dielectric material; b. input means for transmitting an electromagnetic input signal to said resonance chamber through a first one of said openings; c. output means for receiving an electromagnetic output signal from said resonance chamber through a second one of said openings; d. a first region of dielectric material arranged between said input means and said resonance chamber to maintain said resonance chamber and said input means separated from one another; e. a second region of dielectric material arranged between said output means and said resonance chamber to maintain said resonance chamber and said output means separated from one another;
where at least one of said first and second regions is not a part of said layer of subpart (a); andsaid filter assembly further characterized by an operating frequency in the gigahertz to terahertz range, and a Q factor greater than 300. - View Dependent Claims (21, 22)
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23. A high frequency filter assembly comprising:
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a. at least one microresonator having at least one metal-lined resonance chamber and at least two openings, said chamber comprising a metal-lined, micromachined cavity formed in a layer of dielectric material; b. input means for transmitting an electromagnetic input signal to said resonance chamber through a first one of said openings; c. output means for receiving an electromagnetic output signal from said resonance chamber through a second one of said openings; d. a first region of dielectric material arranged between said input means and said resonance chamber to maintain said resonance chamber and said input means separated from one another; e. a second region of dielectric material arranged between said output means and said resonance chamber to maintain said resonance chamber and said output means separated from one another;
where at least one of said first and second regions is not a part of said layer of subpart (a); andsaid at least one microresonator comprises a plurality of microresonators electrically isolated from one another, each said microresonator coupled to said input means and coupled to separate respective said output means for filtering respective frequencies;
said filter assembly further characterized by an operating frequency in the gigahertz to terahertz range, and a O factor greater than 300. - View Dependent Claims (24)
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Specification