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Miniaturized filter assembly

  • US 5,821,836 A
  • Filed: 05/23/1997
  • Issued: 10/13/1998
  • Est. Priority Date: 05/23/1997
  • Status: Expired due to Fees
First Claim
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1. A high frequency microelectronic filter assembly comprising:

  • a. at least one microresonator comprising at least two openings and at least one metal-lined resonance chamber micromachined in a layer of dielectric material;

    b. input means for transmitting an electromagnetic input signal to said resonance chamber through a first one of said openings;

    c. output means for receiving an electromagnetic output signal from said resonance chamber through a second one of said openings;

    d. a first region of dielectric material arranged between said input means and said resonance chamber, for support of said input means and to maintain said resonance chamber and said input means separated from one another; and

    e. a second region of dielectric material arranged between said output means and said resonance chamber, for support of said output means and to maintain said resonance chamber and said output means separated from one another.

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