Integrated microchip chemical sensor

• US 5,822,473 A
• Filed: 02/28/1997
• Issued: 10/13/1998
• Est. Priority Date: 02/29/1996
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Magel, Gregory Anton, Yang, Jau-Yuann, Yuan, Han-Tzong, McDonald, Terrance Gus
• Primary Examiner(s): Ngo, John
• Application Number:
  US08/808,816
• Time in Patent Office: 592 Days
• Field of Search: 385/14, 385/88, 385/89, 385/92, 385/49, 385/129, 385/130, 385/131, 385/132, 385/12, 372/50
• US Class Current: 385/12
• CPC Class Codes: G01N 21/7703 using reagent-clad optical fibres or optical waveguides using measurement of total internal reflection or attenuated total reflection G01N21/552; optical fibres or waveguides per se G02B
• CPC Class Codes: G02B 6/12004 Combinations of two or more optical elements

Abstract

An optical device for sensing properties in an environment such as the presence of a substance or chemical in the zone to be monitored using optical components integrated on a microchip base or substrate. A preferred embodiment introduces a method for fabricating a miniature microchip chemical sensor by integrating a GaAs LED 14 with a polyimide waveguide 48 and a silicon photosensor 16 on the same chip. Light 18 is emitted at the edge of the GaAs LED 14. A portion of the light propagates is detected by a PIN diode 16. A chemical sensitive material 50 is coated on top of a polyimide waveguide 48. When the gas or chemical to which the material is sensitive appears, the light transmitted from the polyimide to air increases, thus the total signal sensed by the photodetector decreases, whereby the change in light signal indicates detection.

Claims

1. A microchip chemical sensor structure for sensing the presence of a substance in an environment comprising:

(a) a semiconductor base;

(b) a source on said base for emitting a light signal;

(c) at least one light detector integrated into the top surface of said base;

(d) one or more waveguides between said source and said light detector to couple at least some of the light from said source to said light detectors; and

(e) a cladding layer comprising a chemical sensitive material disposed on top of at least one of said waveguides such that the index of refraction for a waveguide having said cladding layer of chemical sensitive material will be a function of the concentration of a target chemical in said environment adjacent to said chemical sensitive material.

2. The structure according to claim 1, wherein said source emits light generally parallel and in acute angles to the parallel of said substrate, and at least one of said waveguides is in a plane directly over and parallel to said detector, such that light emitted at angles other than parallel to the detector into said waveguide strike the detector directly or after reflecting from off the cladding layer.

3. The structure according to claim 2, wherein at least one of said waveguides is a layer of polyimide applied over said detector integrated into said base.

4. The structure according to claim 1, wherein at least one of said waveguide has a protective covering between said waveguide core and said cladding layer of chemically sensitive material.

5. The structure according to claim 1, wherein said light source comprises a AuGe thin film for flip-chip die attachment.

6. The structure according to claim 5, wherein said AuGe thin film is self-aligned.

7. The structure according to claim 1, wherein the vertical distance between the LED active layer and the photodetector is less than 4 μ

m.

8. The structure according to claim 1, further comprising a microprocessor to process the sensor output integrated on said base.

9. The structure according to claim 1, wherein the light detector is a PIN diode.

10. The structure according to claim 1, further comprising;

(f) at least four light detectors arranged to detect light from one or more LEDs;

(g) at least two of said waveguide cores which guide light to said light detectors are coated with said chemically sensitive material; and

(h) at least two of said waveguide cores which guide light to said light detectors are not coated with said chemically sensitive material and are thereby protected from the change in index of refraction due to the presence of the property to be sensed in the environment;

wherein said light detectors are arranged in a bridge circuit with a differential output, in such a way to provide common mode rejection of noise and error due to processing anomalies and/or imbalance of exposure of the chemically sensitive material.

11. An integrated microchip chemical sensor structure for sensing the presence of a substance in an environment comprising:

(a) a semiconductor substrate;

(b) an LED structure disposed on the lateral surface of said semiconductor substrate for emitting a light signal;

(c) one or more light detectors disposed in said semiconductor substrate;

(d) one or more waveguides between said LED structure and said light detectors to couple at least some of the light from said LED structure to said light detectors wherein at least one of said waveguides is a layer of polyimide applied over said detector; and

(e) a cladding layer comprising a chemical sensitive material disposed on each of said waveguides, such that the index of refraction for a waveguide having said cladding layer of chemical sensitive material will be a function of the concentration of a target chemical in said environment adjacent to said chemical sensitive material.

12. The structure according to claim 11, wherein said source emits light generally parallel and in acute angles to the parallel of said substrate, and at least one of said waveguides is in a plane directly over and parallel to said detector, such that light emitted at angles other than parallel to the detector into said waveguide may strike the detector directly or after reflecting off the cladding layer.

13. The structure according to claim 12, wherein said detector is a PIN diode integrated into the surface of said substrate.

14. The structure according to claim 11, wherein at least one of said waveguide cores has a protective covering between said waveguide core and said cladding layer of chemically sensitive material.

15. The structure according to claim 11, wherein said LED further comprises a AuGe thin film for flip-chip die attachment.

16. The structure according to claim 11, wherein said AuGe thin film is self-aligned.

17. The structure according to claim 11, wherein the vertical distance between the LED active layer and the photodetector is less than 4 μ

m.

18. The structure according to claim 11, further comprising a microprocessor to process the sensor output integrated on said substrate.

19. The structure according to claim 11, further comprising;

(f) at least four light detectors arranged to detect light from one or more LEDs;

(g) at least two of said waveguide cores which guide light to said light detectors are coated with said chemically sensitive material; and

(h) at least two of said waveguide cores which guide light to said light detectors are not coated with said chemically sensitive material and are thereby protected from the change in index of refraction due to the presence of the property to be sensed in the environment;

wherein said light detectors are arranged in a bridge circuit with a differential output, in such a way to provide common mode rejection of noise and error due to processing anomalies and/or imbalance of exposure of the chemically sensitive material.

20. An integrated microchip chemical sensor structure for sensing the presence of a substance in an environment comprising:

(a) a semiconductor substrate;

(b) an LED structure disposed on the lateral surface of said semiconductor substrate for emitting a light signal;

(c) one or more light detectors integrated into the surface of said semiconductor substrate;

(d) one or more waveguides between said LED structure and said light detectors to couple at least some of the light from said LED structure to said light detectors wherein at least one of said waveguides is a layer of polyimide applied over said detector;

(e) a cladding layer comprising a chemical sensitive material disposed on each of said waveguides, such that the index of refraction for a waveguide having said cladding layer of chemical sensitive material will be a function of the concentration of a target chemical in said environment adjacent to said chemical sensitive material; and

(f) a microprocessor to process the sensor output integrated on said substrate.

21. The structure according to claim 20, wherein said source emits light generally parallel and in acute angles to the parallel of said substrate, and at least one of said waveguides is in a plane and parallel to said detector, such that light emitted at angles other than parallel to the detector into said waveguide may strike the detector directly or after reflecting off the cladding layer.

22. The structure according to claim 20, wherein at least one of said waveguide cores has a protective covering between said waveguide core and said cladding layer of chemically sensitive material.

23. The structure according to claim 20, wherein said LED further comprises a self-aligned AuGe thin film for flip-chip die attachment.

24. The structure according to claim 20, further comprising;

(f) at least four light detectors arranged to detect light from one or more LEDs;

(g) at least two of said waveguide cores which guide light to said light detectors are coated with said chemically sensitive material; and

(h) at least two of said waveguide cores which guide light to said light detectors are not coated with said chemically sensitive material and are thereby protected from the change in index of refraction due to the presence of the property to be sensed in the environment;

wherein said light detectors are arranged in a bridge circuit with a differential output, in such a way to provide common mode rejection of noise and error due to processing anomalies and/or imbalance of exposure of the chemically sensitive material.