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Method of separating electronic elements

  • US 5,824,595 A
  • Filed: 10/03/1996
  • Issued: 10/20/1998
  • Est. Priority Date: 10/17/1995
  • Status: Expired due to Fees
First Claim
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1. A method of separating elements associated within a body during a continuous process of removing material from said body, said method comprising the steps of:

  • creating a separation region within said body between said elements leaving a region of said body to be thinned;

    depositing a delay layer on said body for delaying the removal of material within the region of the body to be thinned, said delay layer having an opening around said separation region and a lower removal rate relative to said body; and

    ,removing material from said delay layer, said separation region, and said region of said body to be thinned in said continuous process.

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