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Condition responsive sensor having a signal conditioning capacitor

  • US 5,824,902 A
  • Filed: 09/30/1996
  • Issued: 10/20/1998
  • Est. Priority Date: 09/30/1996
  • Status: Expired due to Fees
First Claim
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1. A condition responsive sensor comprising first and second substrates, a first electrically conductive stationary plate defining a first capacitor plate disposed on one of the first and second substrates, a condition responsive, electrically conductive sensor element having a movable second capacitor plate portion sandwiched between the first and second substrates and generally aligned with and spaced from the first capacitor plate, the first capacitor plate and the second capacitor plate portion forming a condition responsive capacitor, signal conditioning means comprising a second stationary plate having first and second portions disposed on one of the first and second substrates, the sensor element having a first and a second spaced apart side portion generally aligned with the first and second portions of the second stationary plate respectively, the first and second portions of the second stationary plate being electrically connected to one another, the second stationary plate and the sensor element forming a signal conditioning capacitor.

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