Alkali metal diffusion barrier layer
First Claim
1. A method of depositing a metal oxide barrier film over a glass substrate surface comprising the steps of:
- providing a sputter coating station, the sputter station comprising;
a generally horizontal path of travel, anda sputter coating chamber above the path, the sputter chamber comprising;
a cathode target above the path, anda shield on one side of the cathode target extending downward toward the path defined as a first shield and a shield on the opposite side of the cathode target extending downward toward the path defined as a second shield;
positioning said glass substrate on the path of travel;
energizing the cathode target in an oxidizing atmosphere to direct sputtered metal toward the path of travel;
moving the substrate and coating chamber relative to one another to pass the substrate under the first shield, under the cathode target and under the second shield;
coating the metal oxide barrier film over the substrate surface when the glass substrate is between the first shield and the second shield, said barrier film providing effective diffusion barrier of alkali metal ions from the glass substrate.
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Accused Products
Abstract
Amorphous metal oxide barrier layers of titanium oxide, zirconium oxide and zinc/tin oxide are effective as alkali metal ion barrier layers at thicknesses below 180 Angstroms. The amorphous metal oxide barrier layers are most effective when the density of the layer is equal to or greater than 90% of the crystalline density. The barrier layers prevent migration of alkali metal ions such as sodium ions from glass substrates into a medium e.g. electrolyte of a photochromic cell, liquid material of a liquid crystal display device contacting the glass surface. The properties of the medium, particularly electroconductive metal oxide coatings, are susceptible to deterioration by the presence of sodium ions migrating from the glass.
65 Citations
20 Claims
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1. A method of depositing a metal oxide barrier film over a glass substrate surface comprising the steps of:
providing a sputter coating station, the sputter station comprising; a generally horizontal path of travel, and a sputter coating chamber above the path, the sputter chamber comprising; a cathode target above the path, and a shield on one side of the cathode target extending downward toward the path defined as a first shield and a shield on the opposite side of the cathode target extending downward toward the path defined as a second shield; positioning said glass substrate on the path of travel; energizing the cathode target in an oxidizing atmosphere to direct sputtered metal toward the path of travel; moving the substrate and coating chamber relative to one another to pass the substrate under the first shield, under the cathode target and under the second shield; coating the metal oxide barrier film over the substrate surface when the glass substrate is between the first shield and the second shield, said barrier film providing effective diffusion barrier of alkali metal ions from the glass substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
Specification