Multi-axial angular velocity sensor
First Claim
1. A multi-axial angular velocity sensor for detecting angular velocity components about at least two coordinate axes in a three-dimensional coordinate system, comprising:
- a detection body having flexibility and including a detection layer made of a piezoelectric element;
a plurality of upper electrodes provided on an upper surface of said detection layer;
a plurality of lower electrodes provided on a lower surface of said detection layer and disposed at positions respectively opposite to the plurality of upper electrodes;
an oscillator fixed to said detection body;
a sensor casing for supporting said detection body and accommodating the oscillator therewithin;
means for applying an a.c. signal across a pair of lower and upper electrodes opposite to each other to thereby oscillate the oscillator in a particular coordinate axial direction; and
means for detecting a potential produced across a pair of lower and upper electrodes opposite to each other, thus to detect a displacement in a particular coordinate axial direction of the oscillator.
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Abstract
A flexible substrate (110) having flexibility and a fixed substrate (120) disposed so as to oppose it are supported at their peripheral portions by a sensor casing (140). An oscillator (130) is fixed on the lower surface of the flexible substrate. Five lower electrode layers (F1 to F5: F1 and F2 are disposed at front and back of F5) are formed on the upper surface of the flexible substrate. Five upper electrode layers (E1 to E5) are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. In the case of detecting an angular velocity ωx about the X-axis, an a.c. voltage is applied across a predetermined pair of opposite electrode layers (E5, F5) to allow the oscillator to undergo oscillation Uz in the Z-axis direction. By change of the capacitance value, it is possible to detect the magnitude of the Coriolis force Fy, and to determine angular velocity ωx. Similarly, it is possible to detect an angular velocity ωy about the Y-axis and an angular velocity ωz about the Z-axis.
94 Citations
11 Claims
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1. A multi-axial angular velocity sensor for detecting angular velocity components about at least two coordinate axes in a three-dimensional coordinate system, comprising:
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a detection body having flexibility and including a detection layer made of a piezoelectric element; a plurality of upper electrodes provided on an upper surface of said detection layer; a plurality of lower electrodes provided on a lower surface of said detection layer and disposed at positions respectively opposite to the plurality of upper electrodes; an oscillator fixed to said detection body; a sensor casing for supporting said detection body and accommodating the oscillator therewithin; means for applying an a.c. signal across a pair of lower and upper electrodes opposite to each other to thereby oscillate the oscillator in a particular coordinate axial direction; and means for detecting a potential produced across a pair of lower and upper electrodes opposite to each other, thus to detect a displacement in a particular coordinate axial direction of the oscillator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification