Heat-controlling device
First Claim
1. A heat-controlling device comprising:
- transporting means for supporting and transporting a heat-receiving member in a transporting direction;
a plurality of heating means for applying heat in a width-wise direction of the heat-receiving member, the width-wise direction being perpendicular to the transporting direction, the heating means being placed along the transporting direction of the heat-receiving member; and
control means for individually controlling an amount of heat generated by each of said plurality of heating means, and for setting a heating range of said heating means at a length that does not exceed a length of the heat-receiving member in the transporting direction; and
for only operating the heating means that are included in the heating range; and
for allowing specific-position heating means, which are located at at least the leading end and the rear end in the transporting direction among the heating means that are being operated, to successively vary their outputs in accordance with the movement of the heat-receiving member.
1 Assignment
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Accused Products
Abstract
A heat-controlling device is provided with a transporting carriage for supporting and transporting a semiconductor substrate and a heating device having a plurality of heaters which apply heat in the width-wise direction of the heat-receiving member that is perpendicular to the transporting direction thereof and which are individually controlled by a controller. The controller only operates a set of the heaters that are adjacent the semiconductor substrate. Among the heaters being operated, those heaters, which are located at at least the leading end and the rear end in the transporting direction, have their outputs successively varied in accordance with the movement of the semiconductor substrate. Thus, it becomes possible to easily narrow the temperature distribution of the semiconductor substrate merely by controlling the output of the heaters.
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Citations
20 Claims
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1. A heat-controlling device comprising:
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transporting means for supporting and transporting a heat-receiving member in a transporting direction; a plurality of heating means for applying heat in a width-wise direction of the heat-receiving member, the width-wise direction being perpendicular to the transporting direction, the heating means being placed along the transporting direction of the heat-receiving member; and control means for individually controlling an amount of heat generated by each of said plurality of heating means, and for setting a heating range of said heating means at a length that does not exceed a length of the heat-receiving member in the transporting direction; and
for only operating the heating means that are included in the heating range; and
for allowing specific-position heating means, which are located at at least the leading end and the rear end in the transporting direction among the heating means that are being operated, to successively vary their outputs in accordance with the movement of the heat-receiving member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 20)
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16. A heat-controlling device comprising:
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a frame for supporting a heat-receiving member and for transporting the heat-receiving member in a transporting direction; a plurality of heating elements, each heating element for applying heat to the heat-receiving member in a widthwise direction of the heat-receiving member, the widthwise direction being perpendicular to the transporting direction, said plurality of heating elements being spaced from each other along the transporting direction; and a controller for individually controlling a level of applied heat for each of said plurality of heating elements; wherein the heat-receiving member has a member length taken in the transporting direction; said controller causes a set of said heating elements to apply heat at a given time; a set length of said set of heating elements, taken in the transporting direction, is shorter than the member length of the heat-receiving member; and said set of heating elements applying heat is adjacent to the heat-receiving member and changes to follow the heat-receiving member, as the heat-receiving member is transported in the transporting direction. - View Dependent Claims (17, 18)
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19. A heat-controlling device comprising:
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transporting means for supporting and transporting a heat-receiving member in a transporting direction; and heating means, placed along the transporting direction of the heat-receiving member, for heating the heat-receiving member, wherein a heat-insulating member, which is moved integrally with the transporting means, is placed in the vicinity of a peripheral edge of the heat-receiving member.
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Specification