Article comprising an optical fiber attached to a micromechanical device
First Claim
1. An article having an optical fiber integrally attached to a micro-device, the article comprising:
- a micro-device having spaced movable and nonmoving layers;
an optical fiber attached to the micro-device, the optical fiber having an optical core in optical communication with the nomnoving layer and the movable layer; and
an integrating arrangement for attaching the optical fiber to the micro-device, wherein the integrating arrangement comprises a layer of adhesive that is index-matched to a refractive index of the optical core, wherein,the movable layer is physically adapted for moving relative to the nonmoving layer under the influence of an actuating force, such that the relative movement changes the space between the movable and nonmoving layers so that micro-device reflectivity changes.
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Accused Products
Abstract
An article having an optical fiber integrally attached to a micro-device having spaced movable and nonmoving layers suitable for creating optical interference effects is disclosed. In one configuration, the micro-device is suitable for optical modulation, wherein the movable layer is electrostatically actuated to move towards the nonmoving layer. Such movement changes the size of the gap between the layers, resulting in a change in micro-device reflectivity. An optical signal is modulated by controlling micro-device reflectivity via a controlled voltage source. In a second configuration, the micro-device is suitable for measuring pressure. For pressure measurement, the movable membrane moves in response to pressure changes. The change in membrane position again results in a change in micro-device reflectivity. Reflectivity is correlatable to pressure. In a third configuration, the micro-device is suitable for measuring temperature. In the third configuration, the movable membrane is isolated from pressure effects by the addition of an evacuated cavity located beneath the membrane. The region between the movable and nonmoving layers is gas filled. Changes in gas pressure due to changes in gas temperature cause the movable layer to move, affecting micro-device reflectivity. Reflectivity is correlatable to temperature.
131 Citations
30 Claims
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1. An article having an optical fiber integrally attached to a micro-device, the article comprising:
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a micro-device having spaced movable and nonmoving layers; an optical fiber attached to the micro-device, the optical fiber having an optical core in optical communication with the nomnoving layer and the movable layer; and an integrating arrangement for attaching the optical fiber to the micro-device, wherein the integrating arrangement comprises a layer of adhesive that is index-matched to a refractive index of the optical core, wherein, the movable layer is physically adapted for moving relative to the nonmoving layer under the influence of an actuating force, such that the relative movement changes the space between the movable and nonmoving layers so that micro-device reflectivity changes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for measuring at least a change in a value of a physical condition selected from the group consisting of pressure and temperature, comprising the steps of:
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forming a device having a movable layer that moves in response to the change in the physical condition, the device having a variable reflectivity, wherein the reflectivity varies as a function of the movement of the movable layer; delivering an incoming optical signal to the device, the incoming optical signal having a first amplitude; and measuring a second amplitude of a portion of the incoming optical signal returned from the device as an outgoing optical signal. - View Dependent Claims (23, 24, 25, 26, 27)
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28. A method for making a micro-device suitable for measuring a change in a value of a physical condition selected from the group consisting of pressure and temperature, comprising the step of:
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forming a movable layer spaced from a nonmoving layer, the space therebetween defining a sealed chamber, wherein, the sealed chamber is formed by; depositing a first layer on a support; depositing a rapidly-etchable layer on the first layer; patterning the rapidly-etchable layer into a pill having at least one arm extending therefrom, wherein, the pill is patterned over a first region of the first layer at which the movable layer is to be formed; depositing a second layer over the patterned rapidly-etchable layer; and delivering etchant to the arms and the support; wherein, the etchant etches away the arms forming channels, which channels allow etchant to be delivered to the pill for its removal, thereby forming the sealed chamber, and further wherein, the etchant etches away a portion of the support beneath the first region of the first layer, thereby releasing the first region of the first layer to form the movable layer. - View Dependent Claims (29, 30)
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Specification