Method and system for declusturing semiconductor defect data

• US 5,831,865 A
• Filed: 07/14/1997
• Issued: 11/03/1998
• Est. Priority Date: 06/20/1995
• Status: Expired due to Term

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Berezin, Alan, Quintanilla, Reuben
• Primary Examiner(s): Trans, Vincent N.
• Assistant Examiner(s): FREJD, RUSSELL WARREN
• Application Number:
  US08/891,944
• Time in Patent Office: 477 Days
• Field of Search: 395/500, 324/158 R, 324/62, 437/8, 437/939, 250/572, 382/8, 382/147, 382/149, 371/22.1, 364/468.17, 364/468.28, 364/488, 364/489, 364/490, 364/491
• US Class Current: 382/149
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

Method and system for declustering semiconductor defect data in cooperation with wafer scanning tools. Classification codes are assigned to defect data stored in wafer scan records by first determining the local density of the defects within a preselected area of the wafer substrate and by determining the average density of all of the defects on the substrate. A search area is defined around a defect of interest, the search area having a radius proportional to the ratio of the local density to the average density. The defects are marked within the search area, and for each marked defect, a new search area is defined and additional defects are marked. At least one of the marked defects is then assigned with a "cluster" classification code and the remaining defects within the search areas are assigned with a "discardable" classification code. By increasing the search radius linearly as the density ratio increases, the system automatically and more accurately removes noise in defect data caused by wafer scratches and other defect clusters.

Claims

1. A method for classifying points on a substrate, comprising the steps of:

determining an average density of all points on the substrate;

determining a local density of points within a predetermined area of the substrate;

defining a search area around one of the points, wherein the search area has a size proportional to a ratio of the local density to the average density;

marking points within the search area, and for each marked point, defining a new search area around the marked point, the new search area having a size proportional to a ratio of the local density to the average density, marking unmarked ones of points within the new search area, and repeating the steps of defining a new search area and marking points within new additional points are marked in a search area; and

assigning one of the marked points with a first classification code and assigning remaining marked points with a second classification code.

2. The method of claim 1, wherein the size of the search area is set to a predetermined minimum size if the ratio of the local density to the average density is less than a predetermined value.

3. The method of claim 1, wherein the size of the search area is set to a predetermined maximum size if the ratio of the local density to the average density is greater than a predetermined value.

4. The method of claim 1, wherein the substrate has a plurality of dies and further comprising the step of assigning one point in each die with the first classification code.

5. The method of claim 1, wherein the first classification code is a cluster classification code.

6. The method of claim 5, wherein the second classification code is a discardable classification code.

7. The method of claim 5, further comprising the step of assigning a large cluster classification code if a number of points having the second classification code exceeds a predetermined threshold.

8. The method of claim 1, wherein the points comprise defects on the substrate.

9. A method for classifying defect codes associated with defects on a substrate, comprising the steps of:

(a) determining an average density of defects on the substrate;

(b) selecting a defect of interest;

(c) determining a local density of defects in a selected area surrounding the defect of interest;

(d) defining a search area around the defect of interest, where the search area has a size that is proportional to a ratio of the local density to the average density;

(e) identifying defects within the search area;

(f) for each identified defect, defining a new search area having a size that is proportional to a ratio of the local density to the average density;

(g) for each new search area, identifying defects within the new search area not previously identified;

(h) repeating steps (f)-(g) until no additional defects are identified;

(i) classifying one defect identified in steps (e)-(h) with a first code; and

(j) classifying with a second code, defects other than the one defect.

10. The method of claim 9, wherein the first code is indicative of a cluster defect, and the second code is indicative of a discardable defect.

11. The method of claim 10, wherein the substrate includes a plurality of dice, and the step (i) of classifying one defect as a cluster defect includes the step of classifying one defect in each die as a cluster defect.

12. The method of claim 9, further comprising the steps of:

counting a total of identified defects; and

classifying the one defect with a code indicative of a large cluster if the total is greater than a predetermined number of defects.

13. The method of claim 12, further comprising the step of classifying the one defect with a code indicative of a small cluster if the total is less than a predetermined number of defects.

14. The method of claim 9, wherein the size of the search area is set at a predetermined minimum if the ratio of the local density to the average density is less than a predetermined value.

15. The method of claim 9, wherein the size of the search area is set at a predetermined maximum if the ratio of the local density to the average density is greater than a predetermined value.

16. The method of claim 9, further comprising the step of:

selecting a new defect of interest from unclassified ones of the defects; and

repeating steps (c)-(j) for the new defect of interest.

17. A method for classifying defect codes associated with defects on a substrate, the substrate including a plurality of dies comprising the steps of:

(a) determining an average density of defects on the substrate;

(b) selecting a defect of interest;

(c) determining a local density of defects in a selected area surrounding the defect of interest;

(d) defining a search area around the defect of interest, where the search area has a size that is proportional to a ratio of the local density to the average density, the size of the search area is set at a predetermined minimum if the ratio of the local density to the average density is less than a predetermined value, and the size of the search area is set at a predetermined maximum if the ratio of the local density to the average density is greater than a predetermined value;

(e) identifying defects within the search area;

(f) for each identified defect, defining a new search area having a size that is proportional to a ratio of the local density to the average density;

(g) for each new search area, identifying defects within the new search area not previously identified;

(h) repeating steps (f)-(g) until no additional defects are identified;

(i) classifying one defect in each die as a cluster defect, the defect as identified in steps (e)-(h);

(j) classifying as discardable, defects other than the one defect;

(k) counting a total of identified defects;

(l) classifying the one defect with a first code indicative of a large cluster if the total is greater than a predetermined number of defects, and classifying the one defect with a second code indicative of a small cluster if the total is less than a predetermined number of defects;

(m) selecting a new defect of interest from unclassified ones of the defects; and

(n) repeating steps (c)-(j) for the new defect of interest.

18. An apparatus for classifying points on a substrate, comprising:

means for determining an average density of all points on the substrate;

means for determining a local density of points within a predetermined area of the substrate;

means for defining a search area around one of the points, wherein the search area has a size proportional to a ratio of the local density to the average density;

means for marking points within the search area, and for each marked point, means for defining a new search area around the marked point, the new search area having a size proportional to a ratio of the local density to the average density, means for marking unmarked ones of points within the new search area, and means for repeating defining a new search area and marking points until no additional points are marked in a search area; and

means for assigning one of the marked points with a first classification code and assigning remaining marked points with a second classification code.

19. The apparatus of claim 18, further comprising means for setting the size of the search area to a predetermined minimum size if the ratio of the local density to the average density is less than a predetermined value.

20. The apparatus of claim 18, further comprising means for setting the size of the search area to a predetermined maximum size if the ratio of the local density to the average density is greater than a predetermined value.

21. The apparatus of claim 18, wherein the substrate has a plurality of dies and further comprising means for assigning one point in each die with the first classification code.

22. The apparatus of claim 18, wherein the first classification code is a cluster classification code.

23. The apparatus of claim 22, wherein the second classification code is a discardable classification code.

24. The apparatus of claim 22, further comprising means for assigning a large cluster classification code if a number of points having the second classification code exceeds a predetermined threshold.

25. The apparatus of claim 18, wherein the points comprise defects on the substrate.

26. An apparatus for classifying defect codes associated with defects on a substrate, comprising:

means for determining an average density of defects on the substrate;

means for selecting a defect of interest;

means for determining a local density of defects in a selected area surrounding the defect of interest;

means for defining a search area around the defect of interest, where the search area has a size that is proportional to a ratio of the local density to the average density;

means for identifying defects within the search area;

for each identified defect, means for defining a new search area having a size that is proportional to a ratio of the local density to the average density;

for each new search area, means for identifying defects within the new search area not previously identified;

means for repeating the defining of a new search area and the identifying defects within the new search area until no additional defects are identified;

means for classifying one identified defect with a first code; and

means for classifying with a second code, defects other than the one defect.

27. The apparatus of claim 26, wherein the first code is indicative of a cluster defect, and the second code is indicative of a discardable defect.

28. The apparatus of claim 27, wherein the substrate includes a plurality of dice, and further comprising means for classifying one defect in each die as a cluster defect.

29. The apparatus of claim 26, further comprising:

means for counting a total of identified defects; and

means for classifying the one defect with a code indicative of a large cluster if the total is greater than a predetermined number of defects.

30. The apparatus of claim 29, further comprising means for classifying the one defect with a code indicative of a small cluster if the total is less than a predetermined number of defects.

31. The apparatus of claim 26, further comprising means for setting the size of the search area at a predetermined minimum if the ratio of the local density to the average density is less than a predetermined value.

32. The apparatus of claim 26, further comprising means for setting the size of the search area to a predetermined maximum if the ratio of the local density to the average density is greater than a predetermined value.

33. The apparatus of claim 26, further comprising means for selecting for processing a new defect of interest from unclassified ones of the defects.

34. An apparatus for classifying defect codes associated with defects on a substrate, the substrate including a plurality of dies, comprising:

means for determining an average density of defects on the substrate;

means for selecting a defect of interest;

means for determining a local density of defects in a selected area surrounding the defect of interest;

means for defining a search area around the defect of interest, where the search area has a size that is proportional to a ratio of the local density to the average density, the size of the search area is set at a predetermined minimum if the ratio of the local density to the average density is less than a predetermined value, and the size of the search area is set at a predetermined maximum if the ratio of the local density to the average density is greater than a predetermined value;

means for identifying defects within the search area;

for each identified defect, means for defining a new search area having a size that is proportional to a ratio of the local density to the average density;

for each new search area, means for identifying defects within the new search area not previously identified;

means for repeating defining a new search area identifying defects within the new search area until no additional defects are identified;

means for classifying one defect in each die as a cluster defect;

means for classifying as discardable, defects other than the one defect;

means for counting a total of identified defects;

means for classifying the one defect with a first code indicative of a large cluster if the total is greater than a predetermined number of defects, and classifying the one defect with a second code indicative of a small cluster if the total is less than a predetermined number of defects; and

means for selecting for processing a new defect of interest from unclassified ones of the defects.

35. A computer readable medium comprising instructions for causing a computer to classify points on a substrate by performing the steps of:

determining an average density of all points on the substrate;

determining a local density of points within a predetermined area of the substrate;

defining a search area around one of the points, wherein the search area has a size proportional to a ratio of the local density to the average density;

marking points within the search area, and for each marked point, defining a new search area around the marked point, the new search area having a size proportional to a ratio of the local density to the average density, marking unmarked ones of points within the new search area, and repeating the steps of defining a new search area and marking points until no additional points are marked in a search area; and

assigning one of the marked points with a first classification code and assigning remaining marked points with a second classification code.

36. A computer readable medium comprising instructions for causing a computer to classify defect codes associated with defects on a substrate by performing the steps of:

(a) determining an average density of defects on the substrate;

(b) selecting a defect of interest;

(c) determining a local density of defects in a selected area surrounding the defect of interest;

(d) defining a search area around the defect of interest, where the search area has a size that is proportional to a ratio of the local density to the average density;

(e) identifying defects within the search area;

(f) for each identified defect, defining a new search area having a size that is proportional to a ratio of the local density to the average density;

(g) for each new search area, identifying defects within the new search area not previously identified;

(h) repeating steps (f)-(g) until no additional defects are identified;

(i) classifying one defect identified in steps (e)-(h) with a first code; and

(j) classifying with a second code, defects other than the one defect.

37. A computer readable medium comprising instructions for causing a computer to classify defect codes associated with defects on a substrate, the substrate including a plurality of dies, by performing the steps of:

(a) determining an average density of defects on the substrate;

(b) selecting a defect of interest;

(c) determining a local density of defects in a selected area surrounding the defect of interest;

(d) defining a search area around the defect of interest, where the search area has a size that is proportional to a ratio of the local density to the average density, the size of the search area is set at a predetermined minimum if the ratio of the local density to the average density is less than a predetermined value, and the size of the search area is set at a predetermined maximum if the ratio of the local density to the average density is greater than a predetermined value;

(e) identifying defects within the search area;

(f) for each identified defect, defining a new search area having a size that is proportional to a ratio of the local density to the average density;

(g) for each new search area, identifying defects within the new search area not previously identified;

(h) repeating steps (f)-(g) until no additional defects are identified;

(i) classifying one defect in each die as a cluster defect, the defect as identified in steps (e)-(h);

(j) classifying as discardable, defects other than the one defect;

(k) counting a total of identified defects;

(l) classifying the one defect with a first code indicative of a large cluster if the total is greater than a predetermined number of defects, and classifying the one defect with a second code indicative of a small cluster if the total is less than a predetermined number of defects;

(m) selecting a new defect of interest from unclassified ones of the defects; and

(n) repeating steps (c)-(j) for the new defect of interest.