×

Method and system for declusturing semiconductor defect data

  • US 5,831,865 A
  • Filed: 07/14/1997
  • Issued: 11/03/1998
  • Est. Priority Date: 06/20/1995
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for classifying points on a substrate, comprising the steps of:

  • determining an average density of all points on the substrate;

    determining a local density of points within a predetermined area of the substrate;

    defining a search area around one of the points, wherein the search area has a size proportional to a ratio of the local density to the average density;

    marking points within the search area, and for each marked point, defining a new search area around the marked point, the new search area having a size proportional to a ratio of the local density to the average density, marking unmarked ones of points within the new search area, and repeating the steps of defining a new search area and marking points within new additional points are marked in a search area; and

    assigning one of the marked points with a first classification code and assigning remaining marked points with a second classification code.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×