Magnetic micro-mover

• US 5,834,864 A
• Filed: 09/13/1995
• Issued: 11/10/1998
• Est. Priority Date: 09/13/1995
• Status: Expired due to Term

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett Packard Company (HP Inc.)
• Inventors: Hesterman, Victor W., Walmsley, Robert G., Brandt, Jobst
• Primary Examiner(s): Stephan, Steven L.
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US08/527,479
• Time in Patent Office: 1,154 Days
• Field of Search: 310/12, 310/40 MM, 360/78.05, 360/109, 360/105, 360/78.12, 156/655.1, 156/656.1, 156/657.1, 156/659.11, 156/661.1, 156/662.1
• US Class Current: 310/40.0MM
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/04 Fine scanning or positioning
• CPC Class Codes: G02B 21/32 Micromanipulators structurally combined with microscopes
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G11B 19/20 Driving; Starting; Stopping; Control thereof
• CPC Class Codes: G11B 21/00 Head arrangements not specific to the method of recording or reproducing
• CPC Class Codes: G11B 21/02 Driving or moving of heads
• CPC Class Codes: G11B 21/08 Track changing or selecting G11B21/12 takes precedenceduring transducing operation
• CPC Class Codes: G11B 9/1418 Disposition or mounting of heads or record carriers G11B17/00 and G11B19/00 take precedence
• CPC Class Codes: G11B 9/1436 with provision for moving the heads or record carriers relatively to each other
• CPC Class Codes: H02K 11/00 Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection casings, enclosures or supports H02K5/00
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 33/18 with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
• CPC Class Codes: H02K 41/035 DC motors; Unipolar motors
• CPC Class Codes: H02K 99/00 Subject matter not provided for in other groups of this subclass

Abstract

A specially designed, forceful, compact magnetic micro-mover includes at least one etched single crystal silicon plate having integral springs and stable, low internal stress. A structure of springs which support a rectangular plate are etched in silicon. The plate is driven by planar electromagnetic actuation. The micro-mover consists of a specific etched silicon spring in combination with a planar electromagnetic moving coil actuator that is capable of generating forces greater than 50 mN, while dissipating less than 1 W peak power. The micro-mover also includes a plate suspension system that facilitates the required plate motions and resolution, while preventing changes in plate spacing from effects such as external acceleration, temperature, humidity, and aging; and includes an actuator that appropriately moves the plates in response to electrical signals, such that there is only minimal cross-talk between axes of motion.

Claims

1. A micro-mover, comprising:

two closely spaced silicon plates, at least one of said plates including integral suspension springs that support a moving plate portion; and

means for driving said moving plate portion by planar electromagnetic actuation so as to effect a reciprocal movement of said two plates relative to each other in both an X-direction and a Y-direction, said Y-direction being substantially transverse to said X-direction.

2. The micro-mover of claim 1, comprising:

two substantially identical, closely spaced silicon plates, wherein a first of said plates is adapted for movement in an X-direction, and wherein a second of said plates is adapted for movement in a Y-direction.

3. The micro-mover of claim 1, comprising:

a first, stationary silicon plate; and

a second silicon plate comprising compound springs that are adapted to allow said plate to move in both an X-direction and a Y- direction, relative to said first, stationary plate.

4. The micro-mover of claim 1, wherein said integral springs comprise:

a symmetric folded spring configuration, including a spring formed at each corner or on at least two sides of said moving plate.

5. The micro-mover of claim 1, comprising at least two silicon plates that are assembled facing each other, closely spaced and parallel, having axes of motion at 90°

apart.

6. The micro-mover of claim 1, wherein said moving plate provides a surface upon which a recording medium and/or a read/write device may be placed.

7. The micro-mover of claim 1, said means for driving further comprising:

at least one of an X-axis multipole magnet, a Y-axis multipole magnet, and a combination X-axis/Y-axis multipole magnet.

8. The micro-mover of claim 7, said multipole magnet further comprising:

a flux return plate.

9. The micro-mover of claim 1, further comprising:

one or more covers for hermetically enclosing said micro-mover.

10. The micro-mover of claim 9, said one or more covers further comprising:

one or more spacing posts; and

a seal gasket.

11. The micro-mover of claim 1, said plate further comprising:

one or more contact pads and associated electrical leads.

12. The micro-mover of claim 7, said means for driving further comprising:

at least one drive coil for effecting plate motion, wherein current in said drive coil reacts with a magnetic field developed by said magnet to produce a force that moves said plate against the force of said plate suspension springs.

13. The micro-mover of claim 12, wherein said drive coil is a symmetric coil.

14. The micro-mover of claim 12, wherein said drive coil is an asymmetric coil.

15. The micro-mover of claim 7, said magnet further comprising:

alternating magnetic poles magnetized into a monolithic magnet structure.

16. The micro-mover of claim 1, said means for driving further comprising:

at least one torque coil for producing a correction torque to cancel unwanted torque produced by said drive coil.

17. The micro-mover of claim 1, further comprising:

at least one capacitance position sensor, adapted to change capacitance with relative parallel plate motion, and for producing an output signal in accordance therewith, wherein said position sensor is insensitive to motion in an orthogonal axis and relative plate spacing.

18. The micro-mover of claim 17, said capacitance position sensor further comprising:

three capacitor plates forming two capacitors, comprising a first and a second overlapping capacitor formed on two of said mover plates, wherein relative positive movement of one of said two mover plates increases said first capacitor'"'"'s capacitance and decreases said second capacitor'"'"'s capacitance, and wherein relative negative movement of the same mover plate increases said second capacitor'"'"'s capacitance and decreases said first capacitor'"'"'s capacitance.

19. The micro-mover of claim 18, further comprising:

a first and a second timer circuit, said timer circuits respectively connected to said first and second capacitors, such that when the capacitance of a capacitor associated with a timer is changed, the frequency output of said timer changes; and

a third capacitor/third timer for canceling effects of stray capacitance that has the same stray capacitance as said first and second capacitors but no moving plates.

20. The micro-mover of claim 1, further comprising:

at least one Z-capacitor for controlling and maintaining plate spacing.

21. The micro-mover of claim 11, wherein said electrical leads are routed over said springs to said moving plate on either one or both sides of said plate.

22. The micro-mover of claim 11, further comprising:

an umbilical connector, including leads formed on a flexible insulator that spans a gap between said moving plate and a non-moving portion of said plate.

23. A micro-mover, comprising:

at least two etched single crystal silicon plates, at least one of said plates including a plate suspension system that facilitates relative plate motion with high resolution, while preventing changes in plate spacing due to such effects as external acceleration, temperature, humidity, and aging; and

an actuator that moves said plates in response to electrical signals, while exhibiting only minimal cross-talk between respective axes of plate motion.

24. A micro-mover, comprising:

at least one etched single crystal silicon plate, said plate including integral suspension springs that support a moving plate portion, said suspension springs having a symmetrical double folded spring configuration, including a spring formed at each corner or on each side of said moving plate;

means for driving said moving plate portion by planar electromagnetic actuation, including at least one of an X-axis multipole magnet, a Y-axis multipole magnet, and an X-axis/y-axis multipole magnet, at least one drive coil for effecting plate motion, wherein current in said drive coil reacts with a magnetic field developed by said magnet to produce a force that moves said plate against the force of said plate suspension springs, at least one torque coil for producing a correction torque to cancel unwanted torque produced by said drive coil, and a flux return plate;

at least one capacitance position sensor, adapted to change capacitance with relative parallel plate motion, and for producing an output signal in accordance therewith;

at least one Z-capacitor for controlling and maintaining plate spacing;

one or more contact pads and associated electrical leads; and

one or more covers for hermetically enclosing said micro-mover, at least one of said covers including one or more spacing posts, and a seal gasket.

25. The micro-mover of claim 24, comprising:

two substantially identical, closely spaced silicon plates, wherein a first of said plates is adapted for movement in an X-direction, and wherein a second of said plates is adapted for movement in a Y-direction, wherein said two plates are assembled facing each other, closely spaced and parallel, having axes of motion at 90°

apart.

26. The micro-mover of claim 24, further comprising:

a first, stationary silicon plate; and

a second silicon plate comprising compound springs that are adapted to allow said plate to move in both an X-direction and a Y- direction, opposite said first, stationary plate.