Visible spectrum modulator arrays
First Claim
1. A device for modulating light in the visible spectrum comprisingan array of interferometric modulation elements formed integrally on a substrate, andcontrol circuitry connected to the array for controlling each of the modulation elements independently,each of the modulation elements having two walls that define a cavity, one of the walls being movable relative to the other through a range of positions, the walls causing the cavity to operate interferometrically in at least two of the positions, at least one of the walls serving as a mirror and having at least two layers that cooperate to cause the element to exhibit, in at least one of the two positions, a predetermined optical response to light, each of the two layers contributing substantially to causing the element to exhibit the predetermined optical response.
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Accused Products
Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
920 Citations
46 Claims
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1. A device for modulating light in the visible spectrum comprising
an array of interferometric modulation elements formed integrally on a substrate, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having two walls that define a cavity, one of the walls being movable relative to the other through a range of positions, the walls causing the cavity to operate interferometrically in at least two of the positions, at least one of the walls serving as a mirror and having at least two layers that cooperate to cause the element to exhibit, in at least one of the two positions, a predetermined optical response to light, each of the two layers contributing substantially to causing the element to exhibit the predetermined optical response.
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32. A device for modulating light in the visible spectrum comprising
an array of modulation elements, and control circuitry connected to the array for controlling the amplitude of light delivered by each of the modulation elements independently by discrete digital signals, each of the modulation elements having two walls that define a cavity, one of the walls being movable relative to the other through a range of positions, the walls causing the cavity to operate interferometrically in at least two of the positions, at least one of the walls serving as a mirror and having at least two layers that cooperate to cause the element to exhibit, in at least one of the two positions, a predetermined optical, response to light, each of the two layers contributing substantially to causing the element to exhibit the predetermined optical response.
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34. A device for modulating light in the visible spectrum comprising
a deformable modulation element having a deformation mechanism and an optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic, the deformation mechanism and the optical portion being formed integrally on a substrate, the deformation mechanism comprising a flexible membrane held in tensile stress, and the optical portion being formed on the flexible membrane, and a wall which, together with the optical portion, defines an interference cavity, the deformable modulation element being movable relative to the wall through a range of positions, the optical portion and the wall causing the cavity to operate interferometrically in at least two of the positions, the optical portion serving as a mirror end having at least two layers that cooperate to cause the element to exhibit, in at least one of the two positions, a predetermined optical response to light, each of the two layers contributing substantially to causing the element to exhibit the predetermined optical response.
Specification