Reflective spatial light modulator with encapsulated micro-mechanical elements
First Claim
Patent Images
1. A spatial light modulator comprising:
- an optically transmissive substrate having an upper surface and a lower surface;
at least one deflectable reflective element attached to the lower surface of said optically transmissive substrate;
a second substrate positioned below, parallel, and spaced apart from the lower surface of said optically transmissive substrate, said second substrate containing electronic circuitry capable of selective actuation of each deflectable reflective element attached to said optically transmissive substrate.
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Abstract
A spatial light modulator, comprised of an upper and a lower substrate. One or more electrostatically deflectable mirrors are suspended by torsion hinges from an optically transmissive upper substrate. The upper substrate is held above the lower substrate containing electronic circuitry. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. An aperture layer is built into the upper substrate to enable light to reach only the flat mirror surfaces.
577 Citations
19 Claims
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1. A spatial light modulator comprising:
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an optically transmissive substrate having an upper surface and a lower surface; at least one deflectable reflective element attached to the lower surface of said optically transmissive substrate; a second substrate positioned below, parallel, and spaced apart from the lower surface of said optically transmissive substrate, said second substrate containing electronic circuitry capable of selective actuation of each deflectable reflective element attached to said optically transmissive substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A reflective spatial light modulator comprising:
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a substrate having an array of electrodes thereon; an optically transmissive plate having an upper side and an under side, the optically transmissive substrate being positioned above, parallel to, and spaced apart from the substrate, and having an array of conducting deflectable reflective elements corresponding to the array of electrodes and attached to the underside of the optically transmissive plate. - View Dependent Claims (16, 17)
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18. A process for the fabrication of a spatial light modulator, comprising the steps of:
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depositing a spacer layer on an optically transmissive substrate; etching a pattern of holes in said spacer layer whereby said holes allow attachment of subsequent layers to the substrate; depositing a reflecting layer on said spacer layer; patterning the reflecting layer to define one or more deflectable reflective elements; etching the spacer layer so that the deflectable reflective elements are free and may deflect; forming addressing circuitry and electrodes on a second substrate; aligning and joining the optically transmissive substrate and the second substrate, whereby the deflectable reflective elements may be selectively actuated by said addressing circuitry and electrodes. - View Dependent Claims (19)
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Specification