Catadioptric system for photolithography

• US 5,835,275 A
• Filed: 06/27/1997
• Issued: 11/10/1998
• Est. Priority Date: 06/28/1996
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Takahashi, Tetsuo, Omura, Yasuhiro
• Primary Examiner(s): Epps, Georgia Y.
• Assistant Examiner(s): MACK, RICKY LEVERN
• Application Number:
  US08/883,748
• Time in Patent Office: 501 Days
• Field of Search: 359/629, 359/631, 359/727, 359/728, 359/729, 359/730, 359/731, 359/364
• US Class Current: 359/629
• CPC Class Codes: G02B 17/08 Catadioptric systems used in non-imaging applications G02B19/00
• CPC Class Codes: G02B 17/0892 specially adapted for the UV
• CPC Class Codes: G03F 7/70225 Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
• CPC Class Codes: G03F 7/7025 Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems

Abstract

Catadioptric systems are provided, comprising a first imaging system, a plane mirror, and a second imaging system. The first imaging system comprises a single-pass optical system and a double-pass optical system that further comprises a concave mirror and a double-pass lens group. The second imaging system comprises a plane mirror and an aperture. The first imaging system forms an intermediate image of an object; the second imaging system re-images the intermediate image on a substrate. The catadioptric systems satisfy various conditions.

Claims

1. A catadioptric system for projecting an image of an object onto a substrate, the catadioptric system comprising, from objectwise to imagewise:

(a) a first imaging system having an optical axis and comprising a single-pass optical system and a double-pass optical system, the double-pass optical system comprising a concave mirror and a double-pass lens group, a light flux from the object being received by the single-pass optical system and directed to the double-pass lens group, the double-pass lens group directing the light flux to the concave mirror that reflects the light flux back through the double-pass lens group, thereby forming an intermediate image of the object;

(b) a first plane reflector receiving the light flux from the double-pass lens group;

(c) a second imaging system receiving the light flux from the first plane reflector and forming an image of the object on the substrate, the second imaging system comprising, from objectwise to imagewise, a first lens group, a second plane reflector, and a second lens group, wherein an aperture is disposed in the second lens group and the second plane reflector is disposed between the first lens group and the second lens group;

(d) the catadioptric system satisfying at least one of the following conditions;

space="preserve" listing-type="equation">L.sub.1 /L<

0.1

space="preserve" listing-type="equation">L.sub.1 /L.sub.2 <

0.2

wherein L₁ is an axial distance from the second plane reflector to the aperture, L is an axial distance from the object to the substrate, and L₂ is an axial distance from the first plane reflector to the substrate.

2. The catadioptric system of claim 1, further satisfying the condition:

space="preserve" listing-type="equation">|β

.sub.1 |<

0.2

wherein β

₁ is a magnification of the second lens group of the second imaging system.

3. The catadioptric system of claim 1, further satisfying the condition:

space="preserve" listing-type="equation">|L.sub.1 /f.sub.1 |<

1.5

wherein f₁ is a focal length of the second lens group of the second imaging system.

4. The catadioptric system of claim 3, further satisfying the condition:

space="preserve" listing-type="equation">|β

.sub.1 |<

0.2

wherein β

₁ is a magnification of the second lens group of the second imaging system.

6. A projection-exposure apparatus, comprising a catadioptric system as recited in claim 1.

5. A catadioptric system for projecting an image of an object onto a substrate, the catadioptric system comprising, from objectwise to imagewise:

(a) a first imaging system comprising a single-pass optical system and a double-pass optical system, the double-pass optical system comprising a concave mirror and a double-pass lens group, a light flux from the object being received by the single-pass optical system and directed to the double-pass lens group, the double-pass lens group directing the light flux to the concave mirror that reflects the light flux back through the double-pass lens group, thereby forming an intermediate image of the object;

(b) a first plane reflector receiving the light flux from the double-pass lens group;

(c) a second imaging system receiving the light flux from the first plane reflector and forming an image of the object on the substrate, the second imaging system comprising a second plane reflector and an aperture;

(d) the catadioptric system satisfying at least one of the following conditions;

space="preserve" listing-type="equation">L.sub.1 /L<

0.1

space="preserve" listing-type="equation">L.sub.l /L.sub.2 <

0.2

wherein L₁ is an axial distance from the second plane reflector to the aperture, L is an axial distance from the object to the substrate, and L₂ is an axial distance from the first plane reflector to the substrate.

7. A projection-exposure apparatus, comprising a catadioptric system as recited in claim 5.