Liquid vaporizer system and method

• US 5,835,678 A
• Filed: 07/09/1997
• Issued: 11/10/1998
• Est. Priority Date: 10/03/1996
• Status: Expired due to Term

• Current Assignee: Veeco Instruments Incorporated
• Original Assignee: Emcore Corporation
• Inventors: Li, Ting Kai, Scott, Dane C.
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US08/890,041
• Time in Patent Office: 489 Days
• Field of Search: 118/726, 118/724, 392/394, 392/395, 392/399, 392/400, 392/401
• US Class Current: 392/401
• CPC Class Codes: C23C 16/4486 by producing an aerosol and subsequent evaporation of the droplets or particles

Abstract

A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The invention provides for the independent control of temperature, pressure and precursor stoichiometry during the atomizing and vaporization process thereby rendering the precise precursor vapor quality and quantity required for a given application. The invention employs the use of removable porous media disks which may be varied according to the desired operating pressure and precursors. In operation, the apparatus provides for a liquid precursor to first be atomized into a mist using an ultrasonic nozzle, then vaporized by heated media disks, and mixed with a carrier gas, then forced into CVD reaction chamber.

Claims

1. A modular liquid vaporizing apparatus comprising a housing including at least one liquid precursor supply inlet and at least one vapor outlet, a removable ultrasonic module sized for removable insertion and replacement in said housing at a location with respect to said at least one liquid precursor supply inlet, whereby said ultrasonic module can convert said at least one liquid precursor to an atomized mist, a removable heatable contact surface sized for removable insertion and replacement in said housing at a location with respect to said removable ultrasonic module whereby said heatable contact surface can vaporize said atomized mist by direct contact therewith, said housing including curtain gas entry means for supplying an unheated curtain gas to said housing for preventing said atomized mist from contacting the inner walls of said housing and for preventing vaporization of said atomized mist prior to contact with said removable heatable contact surface and for transporting said atomized mist to said removable heatable contact surface, whereby a vapor can be supplied from said at least one vapor outlet.

2. The apparatus of claim 1 including a removable heating module sized for removable insertion and replacement in said housing in association with said removable heatable contact surface whereby said removable heating module can raise the temperature of said removable heatable contact surface.

3. The apparatus of claim 2 including a plurality of said removable heatable contact surfaces and a corresponding plurality of said removable heating modules each sized for removable insertion and replacement in in series within said housing for sequentially vaporizing said atomized mist.

4. The apparatus of claim 3 wherein each of said plurality of removable heating modules includes a thermocouple for monitoring the temperature of said plurality of heating modules.

5. The apparatus of claim 2 wherein said removable heating module includes a flange for connecting said removable heating module to said atomizing module.

6. The apparatus of claim 5 including a plurality of said removable heating modules wherein said plurality of removable heating modules includes a flange for connecting said plurality of removable heating modules to said removable atomized module or to another of said plurality of removable heating modules.

7. The apparatus of claim 1 wherein said removable heatable contact surface comprises at least one porous contact member.

8. The apparatus of claim 7 wherein said at least one porous contact member comprises at least one porous disk.

9. The apparatus of claim 1 including a plurality of said removable heatable contact surfaces comprising a plurality of porous contact members.

10. The apparatus of claim 9 wherein said plurality of porous contact members comprises a plurality of porous disks.

11. The apparatus of claim 9 wherein said plurality of porous contact members vary in porosity whereby a pressure gradient is formed between said housing and said at least one vapor outlet.

12. The apparatus of claim 1 including means for connecting said at least one vapor outlet to a CVD reaction chamber.