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Electrostatically actuated mesopump having a plurality of elementary cells

  • US 5,836,750 A
  • Filed: 10/09/1997
  • Issued: 11/17/1998
  • Est. Priority Date: 10/09/1997
  • Status: Expired due to Term
First Claim
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1. A mesopump having a plurality of elementary cells, each of said cells comprising:

  • a body forming an electrode cavity having an upper electrode and a lower electrode, each of said electrodes having a curved surface facing toward the curved surface of the other electrode to define said cavity, said body including electrical activation means for selectively energizing said electrodes;

    a bistable diaphragm mounted and grounded in said body and having a major portion located in said cavity between said curved surfaces, said diaphragm being adapted to deflect toward said upper and lower electrode curved surfaces to conform thereto;

    lateral conduit means in said body forming an end conduit, said lateral conduit means being operably connected to the portion of said diaphragm mounted in said body and positioned to be opened and closed by movement of said diaphragm for controlling flow of fluid through said end conduit;

    vertical conduit means operatively connected to at least one curved surface of an electrode cavity for controlling flow of fluid there through by movement of said diaphragm into and out of contact with said vertical conduit means; and

    interconnecting conduit means for connecting said cell to said plurality of cells to form said mesopump;

    whereby activation of said electrodes causes movement of said diaphragm between said curved surfaces of said electrodes to move fluid into and out of said body.

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