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Small glass electrode

  • US 5,837,113 A
  • Filed: 02/08/1996
  • Issued: 11/17/1998
  • Est. Priority Date: 12/06/1990
  • Status: Expired due to Fees
First Claim
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1. A small glass electrode having a bonded structure comprising:

  • a planar glass substrate having a first main surface and having embedded therein, from the first main surface, an inside reference electrode, a first pad and a first lead-in line interconnecting said inside reference electrode and said first pad, said planar glass substrate having a second main surface and having embedded therein, from the second main surface, an outside reference electrode, a second pad and a second lead-in line interconnecting said outside reference electrode and said second pad;

    a first silicon semiconductor substrate bonded to the first main surface of said glass substrate and having a first main surface, at least one reservoir extending into the first silicon semiconductor substrate from the first main surface for holding an aqueous electrolyte and a groove forming a fluid passageway in communication with the reservoir for injecting the aqueous electrolyte into the reservoir, said groove and said reservoir being formed by anisotropic etching of the first silicon semiconductor substrate, the reservoir extending from the first main surface and toward a second opposite main surface of the first silicon semiconductor substrate and the reservoir having a sidewall defining an aperture at the second main surface of the first silicon semiconductor substrate to expose the interior of the reservoir, the aperture being disposed at a location corresponding to the position of the inside reference electrode embedded in the glass substrate;

    a glass sensing film covering and sealing the aperture in the sidewall and thus at a position corresponding to said inside reference electrode; and

    a second silicon semiconductor substrate bonded to the second main surface of said glass substrate and having a first main surface, at least one reservoir extending into the second silicon semiconductor substrate from the first main surface for holding an aqueous electrolyte and a groove for forming a salt bridge communicating between the reservoir and the exterior, said groove and reservoir being formed by anisotropic etching of the second silicon semiconductor substrate, the reservoir covering said outside reference electrode.

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