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Soft magnetic thin film and thin film magnetic head using same

  • US 5,837,392 A
  • Filed: 11/07/1996
  • Issued: 11/17/1998
  • Est. Priority Date: 11/30/1995
  • Status: Expired due to Term
First Claim
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1. A soft magnetic thin film comprising a soft magnetic thin film selected from the group consisting of:

  • (Fe96 Al1.1 V0.4 Nb0.4 Ru1.6 Cu0.5)94 N4 O2 ;

    (Fe96.6 Al1.1 V0.4 Nb0.4 Ru1.6)94 N4 O2 ;

    (Fe97.6 Al1.1 V0.4 Nb0.4 Cu0.5)94 N4 O2 ; and

    (Fe98.1 Al1.1 V0.4 Nb0.4) 94 N4 O2 ;

    said soft magnetic thin film being prepared by a reaction sputtering in which nitrogen and steam (H2 O) are introduced.

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